Problem svgcoat SNF 2007-09-20 14:29:01: Tried coating 3 wafers with 955
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Fri Nov 9 10:19:39 PST 2007
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Comment svgcoat SNF 2007-11-08 15:46:16: 955 0.7 resist update
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Problem svgcoat SNF 2007-09-07 15:37:08: Uniformity problem and alignment
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955 new pump installed.
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Comment svgcoat SNF 2007-11-08 15:46:16: 955 0.7 resist update
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Problem svgcoat SNF 2007-09-07 15:37:08: Uniformity problem and alignment
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