Comment svgcoat SNF 2007-11-20 16:06:54: Resist on backside edges

jparker at snf.stanford.edu jparker at snf.stanford.edu
Tue Nov 20 16:06:54 PST 2007


Very fine bits of resist (<1mm) all around backside edges of wafers. Processed 11/15/07 and noticed 11/20/07, so may be fixed now (ie. if it was a dirty hotplate issue). Saw this over a whole cassette of wafers, running coat program 7.




More information about the svgcoat-pcs mailing list