From vilanova at snf.stanford.edu Tue Oct 2 09:43:14 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 2 Oct 2007 09:43:14 -0700 Subject: Comment svgcoat SNF 2007-10-02 09:43:13: SPR220-7 Pump Message-ID: THE SPR 220-7 PUMP WILL BE BACK FROM VENDOR WEDNESDAY (10/3) OR THURSDAY ( 10/04) From gsosa at snf.stanford.edu Thu Oct 4 07:54:03 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Oct 2007 07:54:03 -0700 Subject: Shutdown svgcoat SNF 2007-10-04 07:54:01: Installing Cybor pump Message-ID: Installing Cybor pump. GS From gsosa at snf.stanford.edu Thu Oct 4 08:39:52 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Oct 2007 08:39:52 -0700 Subject: Shutdown svgcoat SNF 2007-10-04 07:54:01: Installing Cybor pump Message-ID: Unable to install the pump. Need to get some additional fittings. for the pump. System is up for all other resists except the 220-7 resist. GS From gibby at snf.stanford.edu Sat Oct 6 13:38:42 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Sat, 6 Oct 2007 13:38:42 -0700 Subject: Comment svgcoat SNF 2007-10-06 13:38:41: large comet patterns in i-line dispense Message-ID: From gsosa at snf.stanford.edu Mon Oct 8 07:32:20 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 8 Oct 2007 07:32:20 -0700 Subject: Shutdown svgcoat SNF 2007-10-08 07:32:19: Installing Cybor pump Message-ID: Installing cybor pump. From vilanova at snf.stanford.edu Mon Oct 8 07:54:40 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 8 Oct 2007 07:54:40 -0700 Subject: Comment svgcoat SNF 2007-10-06 13:38:41: large comet patterns in i-line dispense Message-ID: Cleaned resist dispense hose, purged line, cycled wafers Uniformity Looks good, ok to use. From gsosa at snf.stanford.edu Mon Oct 8 11:41:40 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 8 Oct 2007 11:41:40 -0700 Subject: Shutdown svgcoat SNF 2007-10-08 07:32:19: Installing Cybor pump Message-ID: Installed pump . connected resist lines and interface cable. Still need to purge in resist and check dispense. GS From gsosa at snf.stanford.edu Wed Oct 10 09:54:27 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 10 Oct 2007 09:54:27 -0700 Subject: Problem svgcoat SNF 2007-09-05 16:18:27: 7um streaking Message-ID: Cybor pump for 7 and 10 micron resist rebuilt by manufacturer. Re-installed and set up pump. Checked 7 micron thickness. Average of 5 measurements: 7.3 microns. System ok to use for thick resist. From gsosa at snf.stanford.edu Wed Oct 10 09:58:57 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 10 Oct 2007 09:58:57 -0700 Subject: Problem svgcoat SNF 2007-09-08 00:41:31: 7um resist Message-ID: Cybor pump for 7 and 10 micron resist rebuilt by manufacturer. Re-installed and set up pump. Checked 7 micron thickness. Average of 5 measurements: 7.3 microns. System ok to use for thick resist. From gsosa at snf.stanford.edu Wed Oct 10 09:59:11 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 10 Oct 2007 09:59:11 -0700 Subject: Problem svgcoat SNF 2007-09-08 01:03:09: Streaks with 7um resist Message-ID: Cybor pump for 7 and 10 micron resist rebuilt by manufacturer. Re-installed and set up pump. Checked 7 micron thickness. Average of 5 measurements: 7.3 microns. System ok to use for thick resist. From gsosa at snf.stanford.edu Wed Oct 10 09:59:31 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 10 Oct 2007 09:59:31 -0700 Subject: Problem svgcoat SNF 2007-09-10 16:21:09: streaking and bubbles Message-ID: Cybor pump for 7 and 10 micron resist rebuilt by manufacturer. Re-installed and set up pump. Checked 7 micron thickness. Average of 5 measurements: 7.3 microns. System ok to use for thick resist. From gsosa at snf.stanford.edu Wed Oct 10 10:00:30 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 10 Oct 2007 10:00:30 -0700 Subject: Comment svgcoat SNF 2007-10-02 09:43:13: SPR220-7 Pump Message-ID: Cybor pump for 7 and 10 micron resist rebuilt by manufacturer. Re-installed and set up pump. Checked 7 micron thickness. Average of 5 measurements: 7.3 microns. System ok to use for thick resist. From mrobles at snf.stanford.edu Fri Oct 12 10:44:43 2007 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Fri, 12 Oct 2007 10:44:43 -0700 Subject: Problem svgcoat SNF 2007-10-12 10:44:42: Upstream Not Ready errors Message-ID: On coater and oven displays. From gsosa at snf.stanford.edu Mon Oct 15 07:09:43 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 15 Oct 2007 07:09:43 -0700 Subject: Problem svgcoat SNF 2007-10-12 10:44:42: Upstream Not Ready errors Message-ID: System is up and running From sbasumal at snf.stanford.edu Mon Oct 15 23:03:23 2007 From: sbasumal at snf.stanford.edu (sbasumal at snf.stanford.edu) Date: Mon, 15 Oct 2007 23:03:23 -0700 Subject: Comment svgcoat SNF 2007-10-15 23:03:22: 955 pattern is uneven Message-ID: Looks abit like the surafce is scratched. Could be a problem with the suckback because cleaning nozzle with Q-tip helped From vilanova at snf.stanford.edu Tue Oct 16 08:36:41 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 16 Oct 2007 08:36:41 -0700 Subject: Comment svgcoat SNF 2007-10-15 23:03:22: 955 pattern is uneven Message-ID: suck back adjusted, cycled wafers, uniformity looks good, ok to use From gibby at snf.stanford.edu Thu Oct 18 12:39:56 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Thu, 18 Oct 2007 12:39:56 -0700 Subject: Comment svgcoat SNF 2007-10-18 12:39:55: i line resist thickness Message-ID: Measured resist thickness and uniformity for i-line resist. Spin speed 1.7 kRPM. 13 point measurement using nanospec. Average thickness: 10153A, SD 181A Most measurements were between 10053 and 10079A, but "comets" on the southern quadrant of the wafer lead to 4 measurements of greater thickness and the resulting increase in the average thickness. From gsosa at snf.stanford.edu Fri Oct 19 08:36:16 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 19 Oct 2007 08:36:16 -0700 Subject: Shutdown svgcoat SNF 2007-10-19 08:36:16: Replacing EBR valve Message-ID: Top EBR valve has an air leak. Replacing the EBR valve. From gsosa at snf.stanford.edu Fri Oct 19 09:08:57 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 19 Oct 2007 09:08:57 -0700 Subject: Shutdown svgcoat SNF 2007-10-19 08:36:16: Replacing EBR valve Message-ID: Replaced the Top EBR valve. Checked out operation. All OK. From chen0622 at snf.stanford.edu Mon Oct 22 20:25:42 2007 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Mon, 22 Oct 2007 20:25:42 -0700 Subject: Problem svgcoat SNF 2007-10-22 20:25:41: could not start Message-ID: From gsosa at snf.stanford.edu Tue Oct 23 08:14:05 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 23 Oct 2007 08:14:05 -0700 Subject: Problem svgcoat SNF 2007-10-22 20:25:41: could not start Message-ID: Reset both system controllers and tested operation in auto. All OK. GS From jparker at snf.stanford.edu Wed Oct 24 09:23:16 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 24 Oct 2007 09:23:16 -0700 Subject: Comment svgcoat SNF 2007-10-24 09:23:15: I-line info Message-ID: 5/7 wafers look great. 2/7 have very light comet partway to edge (not immediately at edge). From jparker at snf.stanford.edu Wed Oct 24 09:29:18 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 24 Oct 2007 09:29:18 -0700 Subject: Comment svgcoat SNF 2007-10-24 09:29:17: I-line info (addendum) Message-ID: Addition to last comment: Test lamp shows 1-2 lighter comets not visible by eye on the 5/7 good wafers. ~2cm from edge. From mrlin at snf.stanford.edu Wed Oct 24 16:15:10 2007 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Wed, 24 Oct 2007 16:15:10 -0700 Subject: Comment svgcoat SNF 2007-10-24 16:15:09: 3612 Message-ID: -suckback issues (air bubble, resist dripping...) -also Mahnaz thought there might be too much dispense (3612 1um) From mahnaz at snf.stanford.edu Wed Oct 24 16:26:37 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 24 Oct 2007 16:26:37 -0700 Subject: Problem svgcoat SNF 2007-10-24 16:26:36: 1 um 3612 Message-ID: looks very bad. suck back needs adjustment, too much resist , arm out of control if you ask my opinion. ran dummy, cleaned tip, did everything. From bryane at snf.stanford.edu Wed Oct 24 17:21:38 2007 From: bryane at snf.stanford.edu (bryane at snf.stanford.edu) Date: Wed, 24 Oct 2007 17:21:38 -0700 Subject: Problem svgcoat SNF 2007-10-24 17:21:37: Don't use Arm 7 - 5mm Edge Bead Removal Message-ID: There is something wrong with the 5mm Edge Bead Removal arm 7 in coat program 7, it swings too far over the center of the wafer From gsosa at snf.stanford.edu Thu Oct 25 16:00:04 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 25 Oct 2007 16:00:04 -0700 Subject: Problem svgcoat SNF 2007-10-24 17:21:37: Don't use Arm 7 - 5mm Edge Bead Removal Message-ID: Checked and corrected arm program. ran dummy wafers and verified 5mm EBR width. all looks OK. GS From gsosa at snf.stanford.edu Thu Oct 25 16:01:04 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 25 Oct 2007 16:01:04 -0700 Subject: Problem svgcoat SNF 2007-10-24 16:26:36: 1 um 3612 Message-ID: Checekd and adjusted suckback. Verified arm program. All OK. Checked with dummy wafers. Looks good. GS