Problem svgcoat SNF 2007-09-05 16:18:27: 7um streaking

gsosa at gsosa at
Wed Oct 10 09:54:27 PDT 2007

Cybor pump for 7 and 10 micron resist rebuilt by manufacturer. Re-installed and set up pump. Checked 7 micron thickness. Average of 5 measurements: 7.3 microns.  System ok to use for thick resist.  

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