Comment svgcoat SNF 2007-10-02 09:43:13: SPR220-7 Pump

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Oct 10 10:00:30 PDT 2007


Cybor pump for 7 and 10 micron resist rebuilt by manufacturer. Re-installed and set up pump. Checked 7 micron thickness. Average of 5 measurements: 7.3 microns.  System ok to use for thick resist.  




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