Comment svgcoat SNF 2007-10-18 12:39:55: i line resist thickness

gibby at snf.stanford.edu gibby at snf.stanford.edu
Thu Oct 18 12:39:56 PDT 2007


Measured resist thickness and uniformity for i-line resist.  Spin speed 1.7 kRPM.
13 point measurement using nanospec.  Average thickness: 10153A, SD 181A
Most measurements were between 10053 and 10079A, but "comets" on the southern quadrant of the wafer lead to 4 measurements of greater thickness and the resulting increase in the average thickness.




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