Problem svgcoat SNF 2007-10-24 17:21:37: Don't use Arm 7 - 5mm Edge Bead Removal

bryane at snf.stanford.edu bryane at snf.stanford.edu
Wed Oct 24 17:21:38 PDT 2007


There is something wrong with the 5mm Edge Bead Removal arm 7 in coat program 7, it swings too far over the center of the wafer




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