Problem svgcoat SNF 2007-10-24 17:21:37: Don't use Arm 7 - 5mm Edge Bead Removal

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Oct 25 16:00:04 PDT 2007


Checked and corrected arm program. ran dummy wafers and verified 5mm EBR width. all looks OK.  GS




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