From king at snf.stanford.edu Sat Sep 1 15:00:15 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Sat, 1 Sep 2007 15:00:15 -0700 Subject: Comment svgcoat SNF 2007-09-01 15:00:14: Send cassette indexer making noise Message-ID: It's working but may want some attention. From jparker at snf.stanford.edu Tue Sep 4 10:59:13 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 4 Sep 2007 10:59:13 -0700 Subject: Comment svgcoat SNF 2007-09-04 10:59:12: Disp1 is high Message-ID: Disp1 dispenses more resist than is needed. Not as bad as last time this occured (~3 weeks ago); maybe 1/3rd more resist than is needed (rough estimate). From jparker at snf.stanford.edu Tue Sep 4 11:58:45 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 4 Sep 2007 11:58:45 -0700 Subject: Problem svgcoat SNF 2007-09-04 11:58:44: 220-7 Resist Streaks Message-ID: For coat program 4, consistently get streaking from center of wafer to edges (3/3 test wafers). Not comets, looks more like an elongated asterisk in middle. 1 cm near edges sometimes (1/3 wafers) has streaks as well (not spots). From jparker at snf.stanford.edu Tue Sep 4 12:30:29 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 4 Sep 2007 12:30:29 -0700 Subject: Problem svgcoat SNF 2007-09-04 12:30:28: Spots at edges when using 3612 Message-ID: Can see tiny spots and small streaks concentric to center of wafer (ie. not radial) about a 1/2 cm from edge when using 3612. Looks like the recent exhaust/backslash issue. From gsosa at snf.stanford.edu Tue Sep 4 15:43:45 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 4 Sep 2007 15:43:45 -0700 Subject: Comment svgcoat SNF 2007-09-04 10:59:12: Disp1 is high Message-ID: Reduced 3612 resist amount. Checked program 7 thickness. OK at 1.04 microns. GS From gsosa at snf.stanford.edu Tue Sep 4 15:49:23 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 4 Sep 2007 15:49:23 -0700 Subject: Problem svgcoat SNF 2007-09-04 12:30:28: Spots at edges when using 3612 Message-ID: reduced the flow amount of the EBR with the micrometer adjustment. Too much flow causes the concentric EBR traces. Had to also modify the arm program to correct the timing between arm and dispense. May still need fine tuning. Also may need to move EBR valve closer to dispense head to improve the timing. GS From vilanova at snf.stanford.edu Wed Sep 5 08:28:21 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Sep 2007 08:28:21 -0700 Subject: Comment svgcoat SNF 2007-09-01 15:00:14: Send cassette indexer making noise Message-ID: Send Cassette Indexer lubricated. ok to use. From vilanova at snf.stanford.edu Wed Sep 5 10:50:59 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Sep 2007 10:50:59 -0700 Subject: Problem svgcoat SNF 2007-09-04 11:58:44: 220-7 Resist Streaks Message-ID: I've Cycled Clean wafers and I couldnt repeat the problem, I also cycled some of the dummy wafers and they came out bad I think some of those dummy wafers need to be replace. From vilanova at snf.stanford.edu Wed Sep 5 10:57:37 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Sep 2007 10:57:37 -0700 Subject: Problem svgcoat SNF 2007-08-27 22:04:09: Air Gap in 955 line Message-ID: checked Pump and cycled wafers, no Air Gap between wafers , But we'll keep an eye to the dispense and pump for program # 5. From fungus at snf.stanford.edu Wed Sep 5 16:18:28 2007 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Wed, 5 Sep 2007 16:18:28 -0700 Subject: Problem svgcoat SNF 2007-09-05 16:18:27: 7um streaking Message-ID: 7um coat is streaky From lindaw at snf.stanford.edu Thu Sep 6 13:01:03 2007 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 6 Sep 2007 13:01:03 -0700 Subject: Comment svgcoat SNF 2007-09-06 13:01:02: new bottle of 3612 Message-ID: I changed out the empty resist bottle. From pradeep13 at snf.stanford.edu Fri Sep 7 11:10:50 2007 From: pradeep13 at snf.stanford.edu (pradeep13 at snf.stanford.edu) Date: Fri, 7 Sep 2007 11:10:50 -0700 Subject: Problem svgcoat SNF 2007-09-07 11:08:41: bad uniformity Message-ID: program 5 i-line not enough coverage uniformity not good From mahnaz at snf.stanford.edu Fri Sep 7 11:29:04 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 Sep 2007 11:29:04 -0700 Subject: Problem svgcoat SNF 2007-09-07 11:29:03: prog 5 suck back is too high back Message-ID: needs immidate help, result is pretty bad. From vilanova at snf.stanford.edu Fri Sep 7 14:04:32 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 7 Sep 2007 14:04:32 -0700 Subject: Problem svgcoat SNF 2007-09-07 11:29:03: prog 5 suck back is too high back Message-ID: cleaned dispense hose, cycled ( at least 2 dummy wafers) ready to use. From vilanova at snf.stanford.edu Fri Sep 7 14:05:07 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 7 Sep 2007 14:05:07 -0700 Subject: Problem svgcoat SNF 2007-09-07 11:08:41: bad uniformity Message-ID: Cyceld Wafers, Cleaned nozzle and dispense hose, ok to use. From pradeep13 at snf.stanford.edu Fri Sep 7 15:37:09 2007 From: pradeep13 at snf.stanford.edu (pradeep13 at snf.stanford.edu) Date: Fri, 7 Sep 2007 15:37:09 -0700 Subject: Problem svgcoat SNF 2007-09-07 15:37:08: Uniformity problem and alignment Message-ID: - non-uniform coat same non-uniformity pattern as earlier runs. - ebr > 7mm?? From mahnaz at snf.stanford.edu Fri Sep 7 15:51:49 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 Sep 2007 15:51:49 -0700 Subject: Problem svgcoat SNF 2007-09-07 15:51:48: prog 5, bad dispense Message-ID: extra drip after initial dispense. EBR in arm 6 should be 2 mm, I got 7mm bad uniformity all around. why EBR nozzel drips? From mahnaz at snf.stanford.edu Fri Sep 7 15:52:20 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 Sep 2007 15:52:20 -0700 Subject: Problem svgcoat SNF 2007-09-07 15:52:20: 3612 line bad suck back Message-ID: From gth at snf.stanford.edu Fri Sep 7 18:59:37 2007 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Fri, 7 Sep 2007 18:59:37 -0700 Subject: Problem svgcoat SNF 2007-09-07 18:59:37: dummies needed. Message-ID: short of dummy wafers From dgunning at snf.stanford.edu Sat Sep 8 00:41:32 2007 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Sat, 8 Sep 2007 00:41:32 -0700 Subject: Problem svgcoat SNF 2007-09-08 00:41:31: 7um resist Message-ID: Still VERY bad 7um coating. Many spots and streaks - appearing in same positions on each wafer in run. From nevran at snf.stanford.edu Sat Sep 8 01:03:09 2007 From: nevran at snf.stanford.edu (nevran at snf.stanford.edu) Date: Sat, 8 Sep 2007 01:03:09 -0700 Subject: Problem svgcoat SNF 2007-09-08 01:03:09: Streaks with 7um resist Message-ID: 7um resist is leaving many streaks on wafers. Tried cleaning nozzle between each coat and still seeing streaks. Can easily see the resist leaving a line when going to the side after dispensing. From gth at snf.stanford.edu Mon Sep 10 00:33:29 2007 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Mon, 10 Sep 2007 00:33:29 -0700 Subject: Problem svgcoat SNF 2007-09-10 00:33:29: streaks in 1u 3612 resist Message-ID: even after 3 dummies. please help ASAP. From vilanova at snf.stanford.edu Mon Sep 10 07:26:27 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 10 Sep 2007 07:26:27 -0700 Subject: Problem svgcoat SNF 2007-09-07 18:59:37: dummies needed. Message-ID: dummy wafers added to coater and developer boxes. From barlian at snf.stanford.edu Mon Sep 10 16:21:09 2007 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Mon, 10 Sep 2007 16:21:09 -0700 Subject: Problem svgcoat SNF 2007-09-10 16:21:09: streaking and bubbles Message-ID: 10 um resist From mahnaz at snf.stanford.edu Tue Sep 11 11:51:56 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 11 Sep 2007 11:51:56 -0700 Subject: Comment svgcoat SNF 2007-09-11 11:51:56: cleaned all the dummies Message-ID: From mahnaz at snf.stanford.edu Thu Sep 13 10:00:01 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 13 Sep 2007 10:00:01 -0700 Subject: Problem svgcoat SNF 2007-09-13 10:00:01: bad uniformity, not enough covrage Message-ID: some ebr back splash as well. From vilanova at snf.stanford.edu Thu Sep 13 14:15:48 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 13 Sep 2007 14:15:48 -0700 Subject: Problem svgcoat SNF 2007-09-13 10:00:01: bad uniformity, not enough covrage Message-ID: adjusted program # 5 resist dispense velocity , purged line, ,adjusted EBR ARm position ,cycled wafers , ok to use. From vilanova at snf.stanford.edu Thu Sep 13 14:16:24 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 13 Sep 2007 14:16:24 -0700 Subject: Comment svgcoat SNF 2007-09-11 11:51:56: cleaned all the dummies Message-ID: Cleared. From vilanova at snf.stanford.edu Thu Sep 13 14:18:54 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 13 Sep 2007 14:18:54 -0700 Subject: Problem svgcoat SNF 2007-09-10 00:33:29: streaks in 1u 3612 resist Message-ID: Adjusted EBR Arm position, , uniformity Good, Also Adjusted EBR arm position for dispense programs 5, 7, 8, ,Cycled wafers , Ok to use. From vilanova at snf.stanford.edu Thu Sep 13 14:19:06 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 13 Sep 2007 14:19:06 -0700 Subject: Problem svgcoat SNF 2007-09-07 15:52:20: 3612 line bad suck back Message-ID: Adjusted EBR Arm position, , uniformity Good, Also Adjusted EBR arm position for dispense programs 5, 7, 8, ,Cycled wafers , Ok to use. From vilanova at snf.stanford.edu Thu Sep 13 14:19:25 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 13 Sep 2007 14:19:25 -0700 Subject: Comment svgcoat SNF 2007-09-06 13:01:02: new bottle of 3612 Message-ID: cleared.- From vilanova at snf.stanford.edu Thu Sep 13 14:21:10 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 13 Sep 2007 14:21:10 -0700 Subject: Problem svgcoat SNF 2007-09-07 15:51:48: prog 5, bad dispense Message-ID: Adjusted EBR program to 2 MM. adjusted velocity resist dispense ,Cycled wafers, ok to use. From vilanova at snf.stanford.edu Fri Sep 14 07:21:00 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 14 Sep 2007 07:21:00 -0700 Subject: Shutdown svgcoat SNF 2007-09-14 07:21:00: Under maintenance........ Message-ID: From vilanova at snf.stanford.edu Fri Sep 14 11:35:10 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 14 Sep 2007 11:35:10 -0700 Subject: Shutdown svgcoat SNF 2007-09-14 07:21:00: Under maintenance........ Message-ID: Maintenance Completed, Cleaned Exhaust catch cup , Adjusted the dispense hose and rate for the 7mm resist we made some improvement Still doesnt looks perfect but it is a lot better than before . From pradeep13 at snf.stanford.edu Fri Sep 14 17:04:32 2007 From: pradeep13 at snf.stanford.edu (pradeep13 at snf.stanford.edu) Date: Fri, 14 Sep 2007 17:04:32 -0700 Subject: Problem svgcoat SNF 2007-09-14 17:04:31: non-uniformity Message-ID: there was considerable non-uniformity on the edges of the wafers. From gsosa at snf.stanford.edu Fri Sep 14 17:56:01 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 14 Sep 2007 17:56:01 -0700 Subject: Problem svgcoat SNF 2007-09-14 17:04:31: non-uniformity Message-ID: Non-unifformity appears as fringes at edge of wafer where there was insufficient resist coverage . Ran 3 bare silicon wafers immediately after users wafers and did not see this problem. THe resist spread very well across surface of wafer. Users wafers were oxide on silicon, processed trhough YES oven. The resist didn't seem to spread as well on these wafers. Will ask staff to see what would cause this to happen. GJS From mahnaz at snf.stanford.edu Tue Sep 18 11:59:48 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 18 Sep 2007 11:59:48 -0700 Subject: Problem svgcoat SNF 2007-09-18 11:59:47: Mike ran 6 wfs and all of them Message-ID: have bad spin and comet in the same location. From gibby at snf.stanford.edu Tue Sep 18 16:13:58 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Tue, 18 Sep 2007 16:13:58 -0700 Subject: Comment svgcoat SNF 2007-09-18 16:13:57: 955 Streaking Message-ID: The 955 dispense consistantly leads to streaked PR.... Just a warning. From afong at snf.stanford.edu Wed Sep 19 09:22:17 2007 From: afong at snf.stanford.edu (afong at snf.stanford.edu) Date: Wed, 19 Sep 2007 09:22:17 -0700 Subject: Comment svgcoat SNF 2007-09-19 09:22:17: spr 955 coating issue Message-ID: Still has suck back issue caused poor spin From mrobles at snf.stanford.edu Thu Sep 20 14:29:01 2007 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Thu, 20 Sep 2007 14:29:01 -0700 Subject: Problem svgcoat SNF 2007-09-20 14:29:01: Tried coating 3 wafers with 955 Message-ID: Each wafer had a different problem: One had a giant comet eminating from the center of the wafer, the second one had uniformity issues, and the resist doesn't cover the third one completely. From gibby at snf.stanford.edu Thu Sep 20 17:04:01 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Thu, 20 Sep 2007 17:04:01 -0700 Subject: Comment svgcoat SNF 2007-09-20 17:04:00: 955 Resist coat looks great Message-ID: From gsosa at snf.stanford.edu Thu Sep 27 07:10:09 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Sep 2007 07:10:09 -0700 Subject: Shutdown svgcoat SNF 2007-09-27 07:10:08: Removing Cybor thick resist pump Message-ID: Removing the pump from the system and sending it out for rebuild. GS From gsosa at snf.stanford.edu Thu Sep 27 08:46:01 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Sep 2007 08:46:01 -0700 Subject: Shutdown svgcoat SNF 2007-09-27 07:10:08: Removing Cybor thick resist pump Message-ID: Removed the cybor thick resist pump from the system. Track is OK to use with 3612 and 955 resist. GS