Problem svgcoat SNF 2007-09-04 11:58:44: 220-7 Resist Streaks

jparker at snf.stanford.edu jparker at snf.stanford.edu
Tue Sep 4 11:58:45 PDT 2007


For coat program 4, consistently get streaking from center of wafer to edges (3/3 test wafers). Not comets, looks more like an elongated asterisk in middle. 1 cm near edges sometimes (1/3 wafers) has streaks as well (not spots).




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