Problem svgcoat SNF 2007-09-04 11:58:44: 220-7 Resist Streaks

[jparker at snf.stanford.edu]

For coat program 4, consistently get streaking from center of wafer to edges (3/3 test wafers). Not comets, looks more like an elongated asterisk in middle. 1 cm near edges sometimes (1/3 wafers) has streaks as well (not spots).