Problem svgcoat SNF 2007-09-04 12:30:28: Spots at edges when using 3612

jparker at snf.stanford.edu jparker at snf.stanford.edu
Tue Sep 4 12:30:29 PDT 2007


Can see tiny spots and small streaks concentric to center of wafer (ie. not radial) about a 1/2 cm from edge when using 3612. Looks like the recent exhaust/backslash issue.




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