Problem svgcoat SNF 2007-09-08 01:03:09: Streaks with 7um resist

nevran at snf.stanford.edu nevran at snf.stanford.edu
Sat Sep 8 01:03:09 PDT 2007


7um resist is leaving many streaks on wafers. Tried cleaning nozzle between each coat and still seeing streaks. Can easily see the resist leaving a line when going to the side after dispensing. 




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