Problem svgcoat SNF 2007-09-13 10:00:01: bad uniformity, not enough covrage

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Sep 13 14:15:48 PDT 2007


adjusted program # 5 resist dispense velocity ,  purged line,
,adjusted EBR ARm position ,cycled wafers , ok to use.




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