Problem svgcoat SNF 2007-09-10 00:33:29: streaks in 1u 3612 resist

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Sep 13 14:18:54 PDT 2007


Adjusted EBR Arm position, , uniformity Good,
Also Adjusted EBR arm position for  dispense programs 5, 7, 8, ,Cycled wafers , Ok to use. 




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