Problem svgcoat SNF 2007-09-07 15:52:20: 3612 line bad suck back
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Thu Sep 13 14:19:06 PDT 2007
Adjusted EBR Arm position, , uniformity Good,
Also Adjusted EBR arm position for dispense programs 5, 7, 8, ,Cycled wafers , Ok to use.
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