Problem svgcoat SNF 2007-09-07 15:51:48: prog 5, bad dispense

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Sep 13 14:21:10 PDT 2007


Adjusted EBR program  to 2 MM.  adjusted velocity resist 
dispense ,Cycled wafers, ok to use. 




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