Problem svgcoat SNF 2007-09-14 17:04:31: non-uniformity

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Sep 14 17:56:01 PDT 2007


Non-unifformity appears as fringes at edge of wafer where there was insufficient resist coverage . Ran 3 bare silicon wafers    immediately after users wafers and did not see this problem. THe resist spread very well across surface of wafer. Users wafers were oxide on silicon, processed trhough YES oven. The resist didn't seem to spread as well on these wafers. Will ask staff to see what would cause this to happen.   GJS




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