Problem svgcoat SNF 2007-09-20 14:29:01: Tried coating 3 wafers with 955

mrobles at snf.stanford.edu mrobles at snf.stanford.edu
Thu Sep 20 14:29:01 PDT 2007


Each wafer had a different problem:  One had a giant comet eminating from the center of the wafer, the second one had uniformity issues, and the resist doesn't cover the third one completely.




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