From vilanova at snf.stanford.edu Fri Apr 11 13:32:56 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Apr 2008 13:32:56 -0700 Subject: Shutdown svgcoat SNF 2008-04-11 13:32:54: Preventive maintenance In progress..... Message-ID: From gsosa at snf.stanford.edu Fri Apr 11 14:50:47 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Apr 2008 14:50:47 -0700 Subject: Shutdown svgcoat SNF 2008-04-11 13:32:54: Preventive maintenance In progress..... Message-ID: Replaced the coater bowl. Cleaned the hotplate surface. Checked and refilled EBR canisters Replaced the 3612 resist bottle. GS/MV From kattsai at snf.stanford.edu Thu Apr 17 17:20:06 2008 From: kattsai at snf.stanford.edu (kattsai at snf.stanford.edu) Date: Thu, 17 Apr 2008 17:20:06 -0700 Subject: Comment svgcoat SNF 2008-04-17 17:20:05: receiver station didn't move Message-ID: i did a hard reset, and everything works fine now. From kattsai at snf.stanford.edu Thu Apr 17 17:20:39 2008 From: kattsai at snf.stanford.edu (kattsai at snf.stanford.edu) Date: Thu, 17 Apr 2008 17:20:39 -0700 Subject: Comment svgcoat SNF 2008-04-17 17:20:39: dispense #2 empty Message-ID: alarm message: dispense 2 empty From munehiro at snf.stanford.edu Thu Apr 17 20:00:18 2008 From: munehiro at snf.stanford.edu (munehiro at snf.stanford.edu) Date: Thu, 17 Apr 2008 20:00:18 -0700 Subject: Problem svgcoat SNF 2008-04-17 20:00:16: touch display problem Message-ID: touch display does not work. From vilanova at snf.stanford.edu Fri Apr 18 08:10:29 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Apr 2008 08:10:29 -0700 Subject: Comment svgcoat SNF 2008-04-17 17:20:05: receiver station didn't move Message-ID: cleared. From vilanova at snf.stanford.edu Fri Apr 18 08:10:38 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Apr 2008 08:10:38 -0700 Subject: Comment svgcoat SNF 2008-04-17 17:20:39: dispense #2 empty Message-ID: cleared. From gsosa at snf.stanford.edu Fri Apr 18 09:01:07 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 18 Apr 2008 09:01:07 -0700 Subject: Problem svgcoat SNF 2008-04-17 20:00:16: touch display problem Message-ID: Re-connected USB connector at back of PC. However, please use the mouse for navigating the screens instead of the touch screen. From mrlin at snf.stanford.edu Fri Apr 18 13:47:35 2008 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Fri, 18 Apr 2008 13:47:35 -0700 Subject: Problem svgcoat SNF 2008-04-18 13:47:35: Week of April 14, Coater Quals Message-ID: -3612 1um & 1.6um: has some streaks/comets From gsosa at snf.stanford.edu Fri Apr 18 16:04:09 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 18 Apr 2008 16:04:09 -0700 Subject: Problem svgcoat SNF 2008-04-18 13:47:35: Week of April 14, Coater Quals Message-ID: Checked and cleaned the nozzles and purged resist. Checked suckback-OK. Checked with dummy wafers. From mrlin at snf.stanford.edu Mon Apr 21 15:40:55 2008 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Mon, 21 Apr 2008 15:40:55 -0700 Subject: Problem svgcoat SNF 2008-04-21 15:40:54: SVG1 Coater Quals, Week of 4/20 Message-ID: 1um 3612: edgebead splatters back onto wafer 7um 3612: very non-uniform From mahnaz at snf.stanford.edu Tue Apr 22 09:57:00 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 22 Apr 2008 09:57:00 -0700 Subject: Problem svgcoat SNF 2008-04-22 09:56:59: 220-7 non uniform Message-ID: I looked at few wafers, no good at all. Ok for covrage for STS etch. From vilanova at snf.stanford.edu Wed Apr 23 07:56:29 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 23 Apr 2008 07:56:29 -0700 Subject: Problem svgcoat SNF 2008-04-22 09:56:59: 220-7 non uniform Message-ID: cleaned catch cup and dispense hose, I cycled many wafers and the result is Good , you have to remember to clean the dispense hose from time to time , sometimes Old resist builts on the edge of the dispense hose and thats why uniformity is not so good, it just took me a couple of minutes to do so, so please clean the hose before running wafers, If the wafer has a lot of Lines ,trenches etc you will never get a 100% good uniformity.ALSO THE USED QTIPS GO IN A ZIP LOCK BAG AND INTO THE HAZARDOUS WASTE CONTAINER NOT IN THE REGULAR GARBAGE!!!!!!!!!!!!!!!! From vilanova at snf.stanford.edu Wed Apr 23 07:56:43 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 23 Apr 2008 07:56:43 -0700 Subject: Problem svgcoat SNF 2008-04-21 15:40:54: SVG1 Coater Quals, Week of 4/20 Message-ID: cleaned catch cup and dispense hose, I cycled many wafers and the result is Good , you have to remember to clean the dispense hose from time to time , sometimes Old resist builts on the edge of the dispense hose and thats why uniformity is not so good, it just took me a couple of minutes to do so, so please clean the hose before running wafers, If the wafer has a lot of Lines ,trenches etc you will never get a 100% good uniformity.ALSO THE USED QTIPS GO IN A ZIP LOCK BAG AND INTO THE HAZARDOUS WASTE CONTAINER NOT IN THE REGULAR GARBAGE!!!!!!!!!!!!!!!! From sanjah at snf.stanford.edu Fri Apr 25 17:25:23 2008 From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu) Date: Fri, 25 Apr 2008 17:25:23 -0700 Subject: Problem svgcoat SNF 2008-04-25 17:25:22: transfer not working Message-ID: From gsosa at snf.stanford.edu Fri Apr 25 18:01:24 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Apr 2008 18:01:24 -0700 Subject: Problem svgcoat SNF 2008-04-25 17:25:22: transfer not working Message-ID: System computer needed rebooting. Reset the computer and track hardware. Cycled wafers through tool. All OK. From mrlin at snf.stanford.edu Mon Apr 28 18:40:01 2008 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Mon, 28 Apr 2008 18:40:01 -0700 Subject: Comment svgcoat SNF 2008-04-28 18:40:01: SVG 1 Quals, Week of 4/27 Message-ID: 1um 3612: good 1.6um 3612: good 7.0um SPR-220-7: nonuniform (sometimes very severe) From cearhart at snf.stanford.edu Wed Apr 30 01:00:59 2008 From: cearhart at snf.stanford.edu (cearhart at snf.stanford.edu) Date: Wed, 30 Apr 2008 01:00:59 -0700 Subject: Problem svgcoat SNF 2008-04-30 01:00:59: problem with receiving station Message-ID: My wafer wouldn't go into the receiving cassette, so I removed it manually. The belts continued to spin, and I tried placing a wafer on them to send to the receiver station. The wafer went into the cassette, but the belts continued to spin and my other wafers would not advance through the stations even after clearing the alarm and resetting the receiver station. I imagine a more experienced user can troubleshoot this. From cearhart at snf.stanford.edu Wed Apr 30 01:12:37 2008 From: cearhart at snf.stanford.edu (cearhart at snf.stanford.edu) Date: Wed, 30 Apr 2008 01:12:37 -0700 Subject: Comment svgcoat SNF 2008-04-30 01:12:36: Message-ID: seems to be working fine now. From vilanova at snf.stanford.edu Wed Apr 30 06:58:05 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 30 Apr 2008 06:58:05 -0700 Subject: Problem svgcoat SNF 2008-04-30 01:00:59: problem with receiving station Message-ID: Sometimes people remove their wafers before they reach the receiving cassette that's why the next User get all of those error messages sometimes once or twice depends of how many wafers the previous user remove, you can press "wafer lost" and that shuold clear the problem. thank you for shopping at SNF. :-) From vilanova at snf.stanford.edu Wed Apr 30 06:58:19 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 30 Apr 2008 06:58:19 -0700 Subject: Comment svgcoat SNF 2008-04-30 01:12:36: Message-ID: