From vilanova at snf.stanford.edu Fri Aug 1 11:01:48 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 1 Aug 2008 11:01:48 -0700 Subject: Problem svgcoat SNF 2008-07-31 18:43:29: Spin chuck won't rise Message-ID: someone used it for manual dispense I think that they were using way to much resist that went into the shaft therefore the spindle wasnt coming all the way up, I cleaned the catch cup , spindle shaft and secondary container , lubricated system, and adjudted the spindle airflow cycled wafers, ok to use. From mahnaz at snf.stanford.edu Thu Aug 7 10:58:04 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 7 Aug 2008 10:58:04 -0700 Subject: Problem svgcoat SNF 2008-08-07 10:58:04: arms opens and closes very hard Message-ID: arms on both spin and bake station opens and close very hard . Also catch cups in need of clean twice a week. From mahnaz at snf.stanford.edu Thu Aug 7 11:17:10 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 7 Aug 2008 11:17:10 -0700 Subject: Shutdown svgcoat SNF 2008-08-07 11:17:09: 1 mm EBR Message-ID: I am running the overlay wafers (14) wafers Due to ARM opening and closing so harshly some wafers have 1 mm EBR, some none. I have notified Gary. From gsosa at snf.stanford.edu Thu Aug 7 11:48:22 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 7 Aug 2008 11:48:22 -0700 Subject: Shutdown svgcoat SNF 2008-08-07 11:17:09: 1 mm EBR Message-ID: Checked and adjusted EBR width. Checked 2 and 5 mm EBR- All OK. From vilanova at snf.stanford.edu Thu Aug 7 15:00:44 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 7 Aug 2008 15:00:44 -0700 Subject: Problem svgcoat2 SNF 2008-08-07 13:04:15: ran 9 wafers with prog 7 2mm EBR the 4th wafer got 5mm EBR Message-ID: Adjusted EBR arm tested ok From chen0622 at snf.stanford.edu Fri Aug 8 10:18:10 2008 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Fri, 8 Aug 2008 10:18:10 -0700 Subject: Shutdown svgcoat SNF 2008-08-08 10:18:09: the wafer could not trafer to hot plate for baking Message-ID: From mahnaz at snf.stanford.edu Fri Aug 8 12:59:16 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 8 Aug 2008 12:59:16 -0700 Subject: Shutdown svgcoat SNF 2008-08-08 10:18:09: the wafer could not trafer to hot plate for baking Message-ID: Th4e problem is not fixed , but the lab member is inneed of using his ASML time so even though the bake is not functioning. I am changing the status from red to yellow. From chen0622 at snf.stanford.edu Fri Aug 8 13:22:27 2008 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Fri, 8 Aug 2008 13:22:27 -0700 Subject: Shutdown svgcoat SNF 2008-08-08 13:22:26: spindle could not go to the bottom? Message-ID: From gsosa at snf.stanford.edu Fri Aug 8 13:58:21 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 8 Aug 2008 13:58:21 -0700 Subject: Shutdown svgcoat SNF 2008-08-08 13:22:26: spindle could not go to the bottom? Message-ID: Checked and cleaned/lubed the spindle guide rods. All tested OK From mahnaz at snf.stanford.edu Fri Aug 15 12:06:06 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 15 Aug 2008 12:06:06 -0700 Subject: Comment svgcoat SNF 2008-08-15 12:06:06: I line 955-.7 Message-ID: Ran test the thickness is 6990A for .7 um. From gsosa at snf.stanford.edu Mon Aug 18 15:39:03 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 18 Aug 2008 15:39:03 -0700 Subject: Comment svgcoat SNF 2008-08-18 15:39:03: Power failure recovery Message-ID: Powered up the track and stabilized hot plates. Tested wafer handling. All looks OK. From dgunning at snf.stanford.edu Tue Aug 19 08:01:51 2008 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Tue, 19 Aug 2008 08:01:51 -0700 Subject: Problem svgcoat SNF 2008-08-19 08:01:51: 2mm EBR = 8mm EBR Message-ID: too big.. From vilanova at snf.stanford.edu Wed Aug 20 08:04:08 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 20 Aug 2008 08:04:08 -0700 Subject: Problem svgcoat SNF 2008-08-19 08:01:51: 2mm EBR = 8mm EBR Message-ID: cycled wafers Using the following programs: 2, 5 ,6 7, and 8 ( 2 MM EBR) and I could not repeat the problem, ALso I noticed I big LoL2000 Beaker spot on the coater by the keypad, Is someone using LoL2000 manually ?? LoL2000 can be use only on Headway Spinner!!!!! From mahnaz at snf.stanford.edu Wed Aug 20 10:06:09 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 20 Aug 2008 10:06:09 -0700 Subject: Shutdown svgcoat SNF 2008-08-20 10:06:09: No EBR Message-ID: I ran 3612 , 1um and 1.6 um no ebr. Ran 955, .7 um no ebr From mahnaz at snf.stanford.edu Wed Aug 20 10:29:28 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 20 Aug 2008 10:29:28 -0700 Subject: Comment svgcoat SNF 2008-08-20 10:29:27: 3612 /955 quals Message-ID: 3612 1 um: 10380A 3612 1.6 um: 1.7256A 955-.7, .7 um: 6985A no ebr Gary is working on it. From gsosa at snf.stanford.edu Wed Aug 20 11:33:50 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 20 Aug 2008 11:33:50 -0700 Subject: Shutdown svgcoat SNF 2008-08-20 10:06:09: No EBR Message-ID: Checked and refilled the EBR canister. Checked and adjusted EBR width. Checked 2 and 5 mm EBR. From vilanova at snf.stanford.edu Thu Aug 21 11:19:00 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 21 Aug 2008 11:19:00 -0700 Subject: Problem svgcoat SNF 2008-08-07 10:58:04: arms opens and closes very hard Message-ID: Adjusted air to transfer Arms. From vilanova at snf.stanford.edu Thu Aug 21 11:20:47 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 21 Aug 2008 11:20:47 -0700 Subject: Comment svgcoat SNF 2008-08-20 10:29:27: 3612 /955 quals Message-ID: I guess the EBR canister was low yesterday , Gary took care of that , now EBR working FIne I cycled wafers and EBR is working Good.