Problem svgcoat SNF 2008-07-31 18:43:29: Spin chuck won't rise

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Aug 1 11:01:48 PDT 2008


someone used it for manual dispense I think that they were
using way to much resist that went into the shaft therefore
the spindle wasnt coming all the way up, I cleaned the catch 
cup , spindle shaft and secondary container , lubricated
 system, and adjudted the spindle airflow cycled wafers, ok
 to use. 




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