Shutdown svgcoat SNF 2008-08-07 11:17:09: 1 mm EBR
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Thu Aug 7 11:48:22 PDT 2008
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Shutdown svgcoat SNF 2008-08-07 11:17:09: 1 mm EBR
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Problem svgcoat2 SNF 2008-08-07 13:04:15: ran 9 wafers with prog 7 2mm EBR the 4th wafer got 5mm EBR
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Checked and adjusted EBR width. Checked 2 and 5 mm EBR- All OK.
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Shutdown svgcoat SNF 2008-08-07 11:17:09: 1 mm EBR
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Problem svgcoat2 SNF 2008-08-07 13:04:15: ran 9 wafers with prog 7 2mm EBR the 4th wafer got 5mm EBR
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