Problem svgcoat2 SNF 2008-08-07 13:04:15: ran 9 wafers with prog 7 2mm EBR the 4th wafer got 5mm EBR

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Aug 7 15:00:44 PDT 2008

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Adjusted EBR arm tested ok

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