Shutdown svgcoat SNF 2008-08-08 10:18:09: the wafer could not trafer to hot plate for baking
chen0622 at snf.stanford.edu
chen0622 at snf.stanford.edu
Fri Aug 8 10:18:10 PDT 2008
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Problem svgcoat2 SNF 2008-08-07 13:04:15: ran 9 wafers with prog 7 2mm EBR the 4th wafer got 5mm EBR
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Shutdown svgcoat SNF 2008-08-08 10:18:09: the wafer could not trafer to hot plate for baking
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Problem svgcoat2 SNF 2008-08-07 13:04:15: ran 9 wafers with prog 7 2mm EBR the 4th wafer got 5mm EBR
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Shutdown svgcoat SNF 2008-08-08 10:18:09: the wafer could not trafer to hot plate for baking
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