Shutdown svgcoat SNF 2008-08-08 10:18:09: the wafer could not trafer to hot plate for baking

mahnaz at mahnaz at
Fri Aug 8 12:59:16 PDT 2008

Th4e problem is not fixed , but the lab member is inneed of using his ASML time so even though the bake is not functioning. I am changing the status from red to yellow.

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