Problem svgcoat SNF 2008-08-19 08:01:51: 2mm EBR = 8mm EBR

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Aug 20 08:04:08 PDT 2008


cycled wafers  Using the following programs:
2,  5 ,6  7, and 8 ( 2 MM EBR) and I could not repeat the 
problem, ALso I noticed I big  LoL2000 Beaker spot on the 
coater by the keypad, Is someone using LoL2000 manually ??
LoL2000 can be use only on Headway Spinner!!!!! 




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