From gsosa at snf.stanford.edu Mon Dec 1 15:50:02 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 1 Dec 2008 15:50:02 -0800 Subject: Comment svgcoat SNF 2008-12-01 15:50:02: 12/1 955 0.7um Thickness test Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(5 points): 6911 Angstroms, Std Dev. 6 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From vilanova at snf.stanford.edu Thu Dec 4 15:04:41 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 4 Dec 2008 15:04:41 -0800 Subject: Comment svgcoat SNF 2008-12-04 15:04:41: program # 5 ( 955 Resist) Message-ID: Someone reported to me earlier that resist (955)program # 5 Uniformity was bad, I 'hve cycled MAny wafers and showed them to the user & Mahnaz, everything looks Fine, ok to use From mahnaz at snf.stanford.edu Thu Dec 4 16:56:40 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 4 Dec 2008 16:56:40 -0800 Subject: Shutdown svgcoat SNF 2008-12-04 16:56:40: wafers are stuck Message-ID: From mahnaz at snf.stanford.edu Thu Dec 4 17:21:14 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 4 Dec 2008 17:21:14 -0800 Subject: Shutdown svgcoat SNF 2008-12-04 16:56:40: wafers are stuck Message-ID: timing is off, wafers get stuck either on the hot plate or chill plate. Reset the track and ran dummies. From shuluc at snf.stanford.edu Thu Dec 4 17:23:35 2008 From: shuluc at snf.stanford.edu (shuluc at snf.stanford.edu) Date: Thu, 4 Dec 2008 17:23:35 -0800 Subject: Problem svgcoat SNF 2008-12-04 17:23:34: transportation issues Message-ID: track stops during the wafer transportation From vilanova at snf.stanford.edu Fri Dec 5 09:00:05 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Dec 2008 09:00:05 -0800 Subject: Problem svgcoat SNF 2008-12-04 17:23:34: transportation issues Message-ID: I checked and cycled wafers Using the hotplate program # 1 ( 60 sec) I couldnt repeat the Users Issue, well keep an Eye on it to see if this problem comeback again . From vilanova at snf.stanford.edu Mon Dec 8 07:56:23 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 8 Dec 2008 07:56:23 -0800 Subject: Comment svgcoat SNF 2008-12-08 07:56:22: cleaned catch cup and hotplate Message-ID: cleaned catch cup , hotplate, adjusted belts on receiving Indexer, ok to use. From mahnaz at snf.stanford.edu Tue Dec 9 09:55:20 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 9 Dec 2008 09:55:20 -0800 Subject: Comment svgcoat SNF 2008-12-09 09:55:20: ran 1.6 um Message-ID: 17250,17254,17243,17226,17268A From laurahughes at snf.stanford.edu Tue Dec 9 17:32:14 2008 From: laurahughes at snf.stanford.edu (laurahughes at snf.stanford.edu) Date: Tue, 9 Dec 2008 17:32:14 -0800 Subject: Problem svgcoat SNF 2008-12-09 17:32:14: receiver wouldn't reset Message-ID: When the "Reset Receiver Station" button was pressed, the receiver didn't change position. Mahnaz seemed to fix the problem. From mahnaz at snf.stanford.edu Tue Dec 9 17:42:20 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 9 Dec 2008 17:42:20 -0800 Subject: Problem svgcoat SNF 2008-12-09 17:32:14: receiver wouldn't reset Message-ID: Try to resets through Prog. manger would not work. did it the old and ugly way. From damodei at snf.stanford.edu Thu Dec 11 13:34:11 2008 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Thu, 11 Dec 2008 13:34:11 -0800 Subject: Comment svgcoat SNF 2008-12-11 13:34:10: program 6 not dispensing resist Message-ID: wafers spin as normal, but resist won't dispense and causes an alarm From vilanova at snf.stanford.edu Thu Dec 11 14:19:21 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 11 Dec 2008 14:19:21 -0800 Subject: Comment svgcoat SNF 2008-12-11 13:34:10: program 6 not dispensing resist Message-ID: Checked program, One of the connector on the power supply was lose, cycled wafers, ok to use/. From mahnaz at snf.stanford.edu Fri Dec 12 17:07:36 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 12 Dec 2008 17:07:36 -0800 Subject: Problem svgcoat SNF 2008-12-12 17:07:36: 220-7 um no good Message-ID: I ran many dummies and cleaned the nozzle l after each wafer. This is the third set of wafers I have been running to qualify the new developer which I am not able to get right. all wafers bad uniformity, visible with eyes and rough EBR. The result is good for sts etch cover though.