Comment svgcoat SNF 2008-12-01 15:50:02: 12/1 955 0.7um Thickness test

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Dec 1 15:50:02 PST 2008


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(5 points): 6911  Angstroms, Std Dev. 6 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




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