Problem svgcoat SNF 2008-12-04 17:23:34: transportation issues
shuluc at snf.stanford.edu
shuluc at snf.stanford.edu
Thu Dec 4 17:23:35 PST 2008
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Shutdown svgcoat SNF 2008-12-04 16:56:40: wafers are stuck
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Problem svgcoat SNF 2008-12-04 17:23:34: transportation issues
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track stops during the wafer transportation
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Shutdown svgcoat SNF 2008-12-04 16:56:40: wafers are stuck
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Problem svgcoat SNF 2008-12-04 17:23:34: transportation issues
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