Problem svgcoat SNF 2008-12-12 17:07:36: 220-7 um no good

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Fri Dec 12 17:07:36 PST 2008


I ran many  dummies and cleaned the nozzle  l after each wafer. This is the third set of wafers I have been running to qualify the new developer which I am not able to get right.
all wafers bad uniformity, visible with eyes and rough EBR.
The result is good for sts etch cover though.




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