From cmcg at snf.stanford.edu Mon Feb 4 20:59:00 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Mon, 4 Feb 2008 20:59:00 -0800 Subject: Problem svgcoat SNF 2008-02-04 20:59:00: bad sensor on cooling plate Message-ID: The sensor on the last cooling plate thinks it see's a wafer before the wafer actually gets there, then alarms, presumably because it cannot get vaccuum on the nonexistant wafer. For now just manually move the wafer onto the cooling plate when it alarms and it will continue as desired. From masaharu at snf.stanford.edu Tue Feb 5 02:50:13 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Tue, 5 Feb 2008 02:50:13 -0800 Subject: Problem svgcoat SNF 2008-02-05 02:50:12: witness weired behavior: program bug? Message-ID: I run 0.7um 2mmEBR program with 12wafers. I saw the wafer after resist coat "goes over(pass)" the previous wafer which was being baked. I mean, half of my wafers were not baked and just passed the bake heter without waiting previous wafer go. I was very surprised when I saw this event. Is it possible program bug? From gsosa at snf.stanford.edu Tue Feb 5 08:25:51 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Feb 2008 08:25:51 -0800 Subject: Shutdown svgcoat SNF 2008-02-05 08:25:51: Wafer transfer problems Message-ID: From gsosa at snf.stanford.edu Tue Feb 5 12:59:35 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Feb 2008 12:59:35 -0800 Subject: Shutdown svgcoat SNF 2008-02-05 08:25:51: Wafer transfer problems Message-ID: Had to reconfigure the track to run in serial mode instead of parallel mode. Checked and adjusted vacuum sensor for HPO chill plate. Checked and adjusted chill plate motor speed(slowed down) to eliminate electrical noise causing false wafer detection on optical sensor. Unstable VP module temperature. Found loose wire lug for RTD at the bottom of the temperature controller. Ran many dry runs to test. All looks OK. From gsosa at snf.stanford.edu Tue Feb 5 13:00:14 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Feb 2008 13:00:14 -0800 Subject: Problem svgcoat SNF 2008-02-05 02:50:12: witness weired behavior: program bug? Message-ID: Had to reconfigure the track to run in serial mode instead of parallel mode. Checked and adjusted vacuum sensor for HPO chill plate. Checked and adjusted chill plate motor speed(slowed down) to eliminate electrical noise causing false wafer detection on optical sensor. Unstable VP module temperature. Found loose wire lug for RTD at the bottom of the temperature controller. Ran many dry runs to test. All looks OK. From gsosa at snf.stanford.edu Tue Feb 5 13:00:25 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Feb 2008 13:00:25 -0800 Subject: Problem svgcoat SNF 2008-02-04 20:59:00: bad sensor on cooling plate Message-ID: Had to reconfigure the track to run in serial mode instead of parallel mode. Checked and adjusted vacuum sensor for HPO chill plate. Checked and adjusted chill plate motor speed(slowed down) to eliminate electrical noise causing false wafer detection on optical sensor. Unstable VP module temperature. Found loose wire lug for RTD at the bottom of the temperature controller. Ran many dry runs to test. All looks OK. From vishal at snf.stanford.edu Wed Feb 6 18:26:50 2008 From: vishal at snf.stanford.edu (vishal at snf.stanford.edu) Date: Wed, 6 Feb 2008 18:26:50 -0800 Subject: Problem svgcoat SNF 2008-02-06 18:26:50: Controller 2 fails Message-ID: Both svgcoat and svgcoat2 show the same problem. Both systems don't work. From gsosa at snf.stanford.edu Thu Feb 7 10:41:19 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 7 Feb 2008 10:41:19 -0800 Subject: Problem svgcoat SNF 2008-02-06 18:26:50: Controller 2 fails Message-ID: There were multiple application windows opened up and only the 1st application window started will properly establish communication with the track system. Please be sure that only one application window is open. I am also working with our vendor to fix this problem and only let 1 application window be opened. From gsosa at snf.stanford.edu Thu Feb 7 14:15:58 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 7 Feb 2008 14:15:58 -0800 Subject: Shutdown svgcoat SNF 2008-02-07 14:15:57: Chill plate vacuum problem Message-ID: From gsosa at snf.stanford.edu Thu Feb 7 14:43:07 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 7 Feb 2008 14:43:07 -0800 Subject: Shutdown svgcoat SNF 2008-02-07 14:15:57: Chill plate vacuum problem Message-ID: Adjusted chill plate vacuum sensor. From fungus at snf.stanford.edu Fri Feb 8 17:44:13 2008 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Fri, 8 Feb 2008 17:44:13 -0800 Subject: Comment svgcoat SNF 2008-02-08 17:44:13: 7um streaky Message-ID: 7um has familiar and noticible streak in it. From gibby at snf.stanford.edu Sun Feb 24 20:37:06 2008 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Sun, 24 Feb 2008 20:37:06 -0800 Subject: Comment svgcoat SNF 2008-02-24 20:37:05: Re: Belt before receiver index Message-ID: I had the same problem. The wafer arrives at the cooling plate, but the plate doesn't accept the wafer. Manually placing the wafer on the cooling plate (over the wafer sensor) clears the alarm. From ywidjaja at snf.stanford.edu Mon Feb 25 00:37:09 2008 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Mon, 25 Feb 2008 00:37:09 -0800 Subject: Problem svgcoat SNF 2008-02-25 00:37:08: Track 1 drain is full -- won't pump Message-ID: Nobody was on it when the alarm goes off. Looks like track 1 drain is full but pressing the pump button won't drain it. From gsosa at snf.stanford.edu Mon Feb 25 14:07:33 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 25 Feb 2008 14:07:33 -0800 Subject: Problem svgcoat SNF 2008-02-25 00:37:08: Track 1 drain is full -- won't pump Message-ID: replaced the external carboy located inthe yellow cabinet. Pumped out solvent waste from both tracks. From gibby at snf.stanford.edu Tue Feb 26 16:10:52 2008 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Tue, 26 Feb 2008 16:10:52 -0800 Subject: Comment svgcoat SNF 2008-02-26 16:10:47: Re: Belt before receiver Message-ID: I had a chance to observe the problem again; the cool plate is retracting intermittantly, so the wafer is not traveling smoothly over the cool plate. From mahnaz at snf.stanford.edu Wed Feb 27 16:50:47 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 27 Feb 2008 16:50:47 -0800 Subject: Comment svgcoat SNF 2008-02-27 16:50:47: cleaned most dummies Message-ID: