Problem svgcoat SNF 2008-02-04 20:59:00: bad sensor on cooling plate

cmcg at snf.stanford.edu cmcg at snf.stanford.edu
Mon Feb 4 20:59:00 PST 2008


The sensor on the last cooling plate thinks it see's a wafer before the wafer actually gets there, then alarms, presumably because it cannot get vaccuum on the nonexistant wafer.  For now just manually move the wafer onto the cooling plate when it alarms and it will continue as desired.




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