Problem svgcoat SNF 2008-02-05 02:50:12: witness weired behavior: program bug?

masaharu at snf.stanford.edu masaharu at snf.stanford.edu
Tue Feb 5 02:50:13 PST 2008


I run 0.7um 2mmEBR program with 12wafers.
I saw the wafer after resist coat "goes over(pass)" 
the previous wafer which was being baked.
I mean, half of my wafers were not baked and just
passed the bake heter without waiting previous wafer go.
I was very surprised when I saw this event. 
Is it possible program bug?




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