Problem svgcoat SNF 2008-02-05 02:50:12: witness weired behavior: program bug?

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Feb 5 13:00:14 PST 2008


Had to reconfigure the track to run in serial mode instead of parallel mode. Checked and adjusted vacuum sensor for HPO chill plate. Checked and adjusted chill plate motor speed(slowed down) to eliminate electrical noise causing false wafer detection on optical sensor. Unstable VP module temperature. Found loose wire lug for RTD at the bottom of the temperature controller. Ran many dry runs to test. All looks OK.




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