Shutdown svgcoat SNF 2008-02-07 14:15:57: Chill plate vacuum problem
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Thu Feb 7 14:43:07 PST 2008
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Shutdown svgcoat SNF 2008-02-07 14:15:57: Chill plate vacuum problem
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Comment svgcoat SNF 2008-02-08 17:44:13: 7um streaky
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Adjusted chill plate vacuum sensor.
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Shutdown svgcoat SNF 2008-02-07 14:15:57: Chill plate vacuum problem
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Comment svgcoat SNF 2008-02-08 17:44:13: 7um streaky
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