Comment svgcoat SNF 2008-02-24 20:37:05: Re: Belt before receiver index

gibby at snf.stanford.edu gibby at snf.stanford.edu
Sun Feb 24 20:37:06 PST 2008


I had the same problem.  The wafer arrives at the cooling plate, but the plate doesn't accept the wafer.  Manually placing the wafer on the cooling plate (over the wafer sensor) clears the alarm.




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