Comment svgcoat SNF 2008-02-26 16:10:47: Re: Belt before receiver

gibby at snf.stanford.edu gibby at snf.stanford.edu
Tue Feb 26 16:10:52 PST 2008


I had a chance to observe the problem again; the cool plate is retracting intermittantly, so the wafer is not traveling smoothly over the cool plate.




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