From gsosa at snf.stanford.edu Thu Jan 3 17:26:53 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 3 Jan 2008 17:26:53 -0800 Subject: Shutdown svgcoat SNF 2008-01-03 17:26:52: Upgrades in progress Message-ID: Still testing recipes with new system controller. From mahnaz at snf.stanford.edu Thu Jan 3 17:52:44 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 3 Jan 2008 17:52:44 -0800 Subject: Comment svgcoat SNF 2008-01-03 17:52:43: 1um and 1.6 um tested ok Message-ID: 1um 11199, 11177, 11182, 11182, 11172 A 1.6 um 17379, 17344, 17353, 17350, 17360A From mahnaz at snf.stanford.edu Thu Jan 3 17:54:10 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 3 Jan 2008 17:54:10 -0800 Subject: Comment svgcoat SNF 2008-01-03 17:54:09: I line resist .7 um tested ok Message-ID: readings are 7022, 6989, 7028, 7018 and 7039A From gsosa at snf.stanford.edu Fri Jan 4 12:07:32 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 4 Jan 2008 12:07:32 -0800 Subject: Shutdown svgcoat SNF 2008-01-03 17:26:52: Upgrades in progress Message-ID: Track is released for some process. Please see coral comments for released programs. From gsosa at snf.stanford.edu Fri Jan 4 12:08:30 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 4 Jan 2008 12:08:30 -0800 Subject: Problem svgcoat SNF 2008-01-04 12:08:29: Track released for some processes Message-ID: Track is released for some process. please see coral comments for released programs From shwong at snf.stanford.edu Fri Jan 4 17:31:15 2008 From: shwong at snf.stanford.edu (shwong at snf.stanford.edu) Date: Fri, 4 Jan 2008 17:31:15 -0800 Subject: Problem svgcoat SNF 2008-01-04 17:31:15: track smells; dispensing not so good Message-ID: The track really smells like resist; seems like one of teh exhaust fans is not working? also the dispensing shows sometimes a mlittle bit of splatter or uneven coverage From mahnaz at snf.stanford.edu Mon Jan 7 11:53:00 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 7 Jan 2008 11:53:00 -0800 Subject: Problem svgcoat SNF 2008-01-07 11:52:59: resist flow needs to be controled, too much dispense. Message-ID: I ran 1.6 um after 3 dummies not uniform, I do not like the way is dispensing . VP hot plate needs to be clean. From mahnaz at snf.stanford.edu Wed Jan 9 10:43:13 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 9 Jan 2008 10:43:13 -0800 Subject: Shutdown svgcoat SNF 2008-01-09 10:43:13: broken belt Message-ID: after gary changed two empty bottles. Gary is working on it. From gsosa at snf.stanford.edu Wed Jan 9 11:53:45 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 9 Jan 2008 11:53:45 -0800 Subject: Shutdown svgcoat SNF 2008-01-09 10:43:13: broken belt Message-ID: replaced drive belt for HPO carriage. From mahnaz at snf.stanford.edu Wed Jan 9 12:15:38 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 9 Jan 2008 12:15:38 -0800 Subject: Problem svgcoat SNF 2008-01-09 12:15:37: I line 1 um very non uniform Message-ID: dispense problem. From mahnaz at snf.stanford.edu Wed Jan 9 12:18:39 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 9 Jan 2008 12:18:39 -0800 Subject: Problem svgcoat SNF 2008-01-09 12:18:38: 3612, 1 um, nonuniform Message-ID: From mahnaz at snf.stanford.edu Wed Jan 9 15:21:53 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 9 Jan 2008 15:21:53 -0800 Subject: Comment svgcoat SNF 2008-01-09 15:21:53: After Gary worked on the Message-ID: 1 um I line 955 looks perfect. From cmcg at snf.stanford.edu Wed Jan 9 16:29:17 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Wed, 9 Jan 2008 16:29:17 -0800 Subject: Problem svgcoat SNF 2008-01-09 16:29:16: streaks on 5 0.7um w/VP 2mm EBR Message-ID: There were some streaks when running 5 0.7um w/VP 2mm EBR. Wafer was cleaned prior to running. From gsosa at snf.stanford.edu Thu Jan 10 17:39:09 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 10 Jan 2008 17:39:09 -0800 Subject: Problem svgcoat SNF 2008-01-10 17:39:08: Vapor prime module down Message-ID: The vapor prime module is not working correctly. Please use YES oven to prime wafers. Track is OK to use without VP module. From rmelamud at snf.stanford.edu Thu Jan 10 22:34:30 2008 From: rmelamud at snf.stanford.edu (rmelamud at snf.stanford.edu) Date: Thu, 10 Jan 2008 22:34:30 -0800 Subject: Problem svgcoat SNF 2008-01-10 22:34:30: 7 1um wo/VP w2mm EBR Message-ID: Ran program, got radial streaking pattern. Please check. The streaking was slight, but I need uniformity for critical freatures. Thanks! From gsosa at snf.stanford.edu Fri Jan 11 09:28:28 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2008 09:28:28 -0800 Subject: Shutdown svgcoat SNF 2008-01-11 09:28:28: top EBR not working Message-ID: Top EBR not working From vilanova at snf.stanford.edu Fri Jan 11 14:50:49 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2008 14:50:49 -0800 Subject: Comment svgcoat SNF 2008-01-11 14:50:48: REPLACED EBR VALVE. Message-ID: From gsosa at snf.stanford.edu Fri Jan 11 19:41:56 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2008 19:41:56 -0800 Subject: Shutdown svgcoat SNF 2008-01-11 09:28:28: top EBR not working Message-ID: Replaced the clogged top EBR nozzle. Alos worked on 3612 poor spin issues. All looks good now. Verified thickness on 1.0 and 1.6 micron. All OK. From nppatil at snf.stanford.edu Wed Jan 16 22:27:02 2008 From: nppatil at snf.stanford.edu (nppatil at snf.stanford.edu) Date: Wed, 16 Jan 2008 22:27:02 -0800 Subject: Problem svgcoat SNF 2008-01-16 22:27:02: Large EBR Message-ID: Program 7: 1 um 3612 (2mm EBR) had > 10 mm EBR From gsosa at snf.stanford.edu Thu Jan 17 10:06:18 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 17 Jan 2008 10:06:18 -0800 Subject: Problem svgcoat SNF 2008-01-16 22:27:02: Large EBR Message-ID: Checked and re-adjusted the EBR arm. Checked 2 and 5 mm EBR. Looks good. From mahnaz at snf.stanford.edu Thu Jan 17 11:33:21 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 17 Jan 2008 11:33:21 -0800 Subject: Comment svgcoat SNF 2008-01-17 11:33:17: cleaned all the dummies!!! Message-ID: From cmcg at snf.stanford.edu Sun Jan 20 18:19:49 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Sun, 20 Jan 2008 18:19:49 -0800 Subject: Comment svgcoat SNF 2008-01-20 18:19:48: temp error Message-ID: temp error comes on repeatedly freezing process half way through From gsosa at snf.stanford.edu Tue Jan 22 09:34:42 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 22 Jan 2008 09:34:42 -0800 Subject: Problem svgcoat SNF 2008-01-10 22:34:30: 7 1um wo/VP w2mm EBR Message-ID: Adjusted pump and arm timing. From gsosa at snf.stanford.edu Tue Jan 22 09:35:05 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 22 Jan 2008 09:35:05 -0800 Subject: Problem svgcoat SNF 2008-01-09 12:18:38: 3612, 1 um, nonuniform Message-ID: Adjusted pump and arm timing From gsosa at snf.stanford.edu Tue Jan 22 09:35:35 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 22 Jan 2008 09:35:35 -0800 Subject: Problem svgcoat SNF 2008-01-07 11:52:59: resist flow needs to be controled, too much dispense. Message-ID: Adjusted pump and arm timing. Cleaned the VP hotplate From gsosa at snf.stanford.edu Tue Jan 22 09:36:08 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 22 Jan 2008 09:36:08 -0800 Subject: Problem svgcoat SNF 2008-01-09 12:15:37: I line 1 um very non uniform Message-ID: Adjusted pump and arm timing From gsosa at snf.stanford.edu Tue Jan 22 09:36:34 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 22 Jan 2008 09:36:34 -0800 Subject: Problem svgcoat SNF 2008-01-04 17:31:15: track smells; dispensing not so good Message-ID: Adjusted pump and arm timing. From gsosa at snf.stanford.edu Tue Jan 22 09:36:58 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 22 Jan 2008 09:36:58 -0800 Subject: Problem svgcoat SNF 2008-01-04 12:08:29: Track released for some processes Message-ID: From gsosa at snf.stanford.edu Tue Jan 22 09:37:20 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 22 Jan 2008 09:37:20 -0800 Subject: Problem svgcoat SNF 2008-01-09 16:29:16: streaks on 5 0.7um w/VP 2mm EBR Message-ID: From vilanova at snf.stanford.edu Wed Jan 23 07:56:07 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 23 Jan 2008 07:56:07 -0800 Subject: Comment svgcoat SNF 2008-01-23 07:56:07: I found the left top panel............ Message-ID: I found the left top panel lights all red, this is because the waste container under the machine is full and nobody took the time to empty it, I just emptied both of them , this is done by just pressing down the left and right buttons on the top right hand of the system . From mahnaz at snf.stanford.edu Wed Jan 23 11:13:08 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 23 Jan 2008 11:13:08 -0800 Subject: Shutdown svgcoat SNF 2008-01-23 11:13:08: EBR leak Message-ID: Tray under the track is full of the EBR and 1um 3612 is dripping one extrra drop , suck back needs adjustment. From gsosa at snf.stanford.edu Wed Jan 23 11:58:01 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 23 Jan 2008 11:58:01 -0800 Subject: Shutdown svgcoat SNF 2008-01-23 11:13:08: EBR leak Message-ID: Ran wafers through both tracks. Could not find a leak. Cleaned up residual solvent . Checked and adjusted suckback on 3612 resist pump. M&G From mahnaz at snf.stanford.edu Wed Jan 23 15:18:34 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 23 Jan 2008 15:18:34 -0800 Subject: Problem svgcoat SNF 2008-01-23 15:18:33: 1um 3612 Message-ID: non uniform in the center, needs to adjust the dispense, after ran 3 dummies and cleaned the nozzel out of 10 wfs only 5 kind of ok. back of almost all wafers has EBR residue. From mahnaz at snf.stanford.edu Wed Jan 23 15:19:52 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 23 Jan 2008 15:19:52 -0800 Subject: Problem svgcoat SNF 2008-01-23 15:19:51: nonuniform 1 um I line Message-ID: non uniform in the center all 4 wafers From jparker at snf.stanford.edu Wed Jan 23 17:34:58 2008 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 23 Jan 2008 17:34:58 -0800 Subject: Problem svgcoat SNF 2008-01-23 17:34:57: 7um resist bubble Message-ID: When coating 7 um resist, for 4 out of 5 wafers a bubble near (.5 cm-2.5 cm) from the center caused a large comet. A thin line from the dispense nozzle to the center of the wafer happens at the end of the dispense to cause this bubble. From mvikram at snf.stanford.edu Thu Jan 24 19:20:03 2008 From: mvikram at snf.stanford.edu (mvikram at snf.stanford.edu) Date: Thu, 24 Jan 2008 19:20:03 -0800 Subject: Problem svgcoat SNF 2008-01-24 19:20:02: Error on Track 1: Controller 2 Fails Message-ID: Unable to download program. From gsosa at snf.stanford.edu Fri Jan 25 09:40:25 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Jan 2008 09:40:25 -0800 Subject: Problem svgcoat SNF 2008-01-24 19:20:02: Error on Track 1: Controller 2 Fails Message-ID: Reset the PC. From vilanova at snf.stanford.edu Fri Jan 25 10:58:00 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 25 Jan 2008 10:58:00 -0800 Subject: Problem svgcoat SNF 2008-01-23 17:34:57: 7um resist bubble Message-ID: Cleaned catch cup, adjusted the dispense hose( I noticed that if the dispense hose is far away from the wafer the uniformity is a lot better I also recomend to clean the dispense hose from time to time DO NOT USE A Q-TIP WITH A LOT OF ACETONE , THIS WILL GET A LOT OF ACETONE OVER YOUR WAFER WHILE YOU CLEAN THE DISPENSE HOSE, YOU CAN STILL USE IT BUT JUST AS LITTLE ACETONE AS POSSIBLE) I Also adjusted the suck back and that also helped to see a better uniformity on your wafer. ,my tests wafers were not PERFECT but lets say they are 98% better than the way it was before. From vilanova at snf.stanford.edu Mon Jan 28 07:51:40 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 28 Jan 2008 07:51:40 -0800 Subject: Comment svgcoat SNF 2008-01-28 07:51:40: Post bake hotplate not working Message-ID: When I came in this morning I noticed that the post bake hotplate was off, I ,m letting user finished what he is doing ( he will bake his wafers on track 2 ) before shutdown and pinpoint the problem. From gsosa at snf.stanford.edu Mon Jan 28 09:01:06 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 28 Jan 2008 09:01:06 -0800 Subject: Shutdown svgcoat SNF 2008-01-28 09:01:06: Bake plate problem Message-ID: Run-away temperature on 90deg bake. From gsosa at snf.stanford.edu Mon Jan 28 12:25:44 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 28 Jan 2008 12:25:44 -0800 Subject: Shutdown svgcoat SNF 2008-01-28 09:01:06: Bake plate problem Message-ID: Replaced and calibrated the hotplate controller. From mahnaz at snf.stanford.edu Tue Jan 29 12:24:27 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 29 Jan 2008 12:24:27 -0800 Subject: Problem svgcoat SNF 2008-01-23 15:19:51: nonuniform 1 um I line Message-ID: Created new arm program and tested the system looks pretty good. From mahnaz at snf.stanford.edu Tue Jan 29 12:25:24 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 29 Jan 2008 12:25:24 -0800 Subject: Comment svgcoat SNF 2008-01-09 15:21:53: After Gary worked on the Message-ID: Created new Arm prg. From mahnaz at snf.stanford.edu Tue Jan 29 12:25:46 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 29 Jan 2008 12:25:46 -0800 Subject: Comment svgcoat SNF 2008-01-03 17:54:09: I line resist .7 um tested ok Message-ID: From mahnaz at snf.stanford.edu Tue Jan 29 12:26:11 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 29 Jan 2008 12:26:11 -0800 Subject: Comment svgcoat SNF 2007-12-13 09:29:52: exhaust duct Message-ID: Gary worked on it during Holiday. From mahnaz at snf.stanford.edu Tue Jan 29 12:33:25 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 29 Jan 2008 12:33:25 -0800 Subject: Comment svgcoat SNF 2007-12-11 09:56:19: spr220-7 update!! Message-ID: Taken care of it while back. From mahnaz at snf.stanford.edu Tue Jan 29 12:34:04 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 29 Jan 2008 12:34:04 -0800 Subject: Comment svgcoat SNF 2007-11-28 14:38:08: replaced empty bottle resist, 220-7 Message-ID: done From mahnaz at snf.stanford.edu Tue Jan 29 12:34:17 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 29 Jan 2008 12:34:17 -0800 Subject: Comment svgcoat SNF 2007-12-04 14:36:50: replaced resist Bottle, cleaned chuck........... Message-ID: done From mahnaz at snf.stanford.edu Tue Jan 29 12:34:30 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 29 Jan 2008 12:34:30 -0800 Subject: Comment svgcoat SNF 2007-12-05 16:12:40: MICROSCOPE! Message-ID: wrong spot. From mahnaz at snf.stanford.edu Tue Jan 29 12:35:14 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 29 Jan 2008 12:35:14 -0800 Subject: Comment svgcoat SNF 2007-12-06 14:04:53: short of 220-7 resist Message-ID: back to normal, ofcourse do not waste. From mahnaz at snf.stanford.edu Tue Jan 29 12:35:26 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 29 Jan 2008 12:35:26 -0800 Subject: Comment svgcoat SNF 2007-12-11 07:46:21: 220-7 update Message-ID: From mahnaz at snf.stanford.edu Tue Jan 29 12:35:52 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 29 Jan 2008 12:35:52 -0800 Subject: Comment svgcoat SNF 2007-11-08 09:07:54: 955 0.7 process not available Message-ID: old info. From mahnaz at snf.stanford.edu Tue Jan 29 12:36:30 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 29 Jan 2008 12:36:30 -0800 Subject: Comment svgcoat SNF 2007-11-07 15:05:44: Scheduled downtime 11/8/2007 Message-ID: totally old From mahnaz at snf.stanford.edu Tue Jan 29 12:37:09 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 29 Jan 2008 12:37:09 -0800 Subject: Comment svgcoat SNF 2007-11-08 15:46:16: 955 0.7 resist update Message-ID: From mahnaz at snf.stanford.edu Tue Jan 29 12:37:45 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 29 Jan 2008 12:37:45 -0800 Subject: Comment svgcoat SNF 2007-11-20 16:06:54: Resist on backside edges Message-ID: Been taken care of. From mahnaz at snf.stanford.edu Tue Jan 29 12:38:00 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 29 Jan 2008 12:38:00 -0800 Subject: Comment svgcoat SNF 2007-11-28 11:07:25: Someone ran a wafer upside down again??? Message-ID: From mahnaz at snf.stanford.edu Tue Jan 29 12:38:33 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 29 Jan 2008 12:38:33 -0800 Subject: Comment svgcoat SNF 2008-01-11 14:50:48: REPLACED EBR VALVE. Message-ID: Thank you From mahnaz at snf.stanford.edu Tue Jan 29 12:38:50 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 29 Jan 2008 12:38:50 -0800 Subject: Comment svgcoat SNF 2008-01-17 11:33:17: cleaned all the dummies!!! Message-ID: Good job. From mahnaz at snf.stanford.edu Tue Jan 29 12:39:18 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 29 Jan 2008 12:39:18 -0800 Subject: Comment svgcoat SNF 2008-01-23 07:56:07: I found the left top panel............ Message-ID: ok. From jparker at snf.stanford.edu Wed Jan 30 10:53:19 2008 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 30 Jan 2008 10:53:19 -0800 Subject: Problem svgcoat SNF 2008-01-30 10:53:19: Belt before receiver index Message-ID: Wafers on belt immediately before receiver index sometimes don't make it to the last sensor for the cooldown step. Happened twice during a half cassette of wafers. From jparker at snf.stanford.edu Wed Jan 30 12:16:22 2008 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 30 Jan 2008 12:16:22 -0800 Subject: Comment svgcoat SNF 2008-01-30 12:16:22: Addition to above jparker comment Message-ID: Have run 20 wafers with an i-line program, and have not seen the belt before the receiver cassette have the same problem as above. Not sure what program was run when problem did occur, as problem was seen and reported while waiting for another user to finish. From mahnaz at snf.stanford.edu Wed Jan 30 14:55:46 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 30 Jan 2008 14:55:46 -0800 Subject: Shutdown svgcoat SNF 2008-01-30 14:55:45: EBR leak. Message-ID: From gsosa at snf.stanford.edu Wed Jan 30 15:54:16 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 30 Jan 2008 15:54:16 -0800 Subject: Shutdown svgcoat SNF 2008-01-30 14:55:45: EBR leak. Message-ID: Isolated EBR leak to back track. Front track OK From gsosa at snf.stanford.edu Thu Jan 31 13:06:10 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 31 Jan 2008 13:06:10 -0800 Subject: Problem svgcoat SNF 2008-01-31 13:06:01: 3612 poor spin issues Message-ID: 3612 resist programs showing an unusual starburs pattern. Have not identified problem yet. Try to use track #2 for 3612 before this track.