Problem svgcoat SNF 2008-01-09 16:29:16: streaks on 5 0.7um w/VP 2mm EBR

cmcg at snf.stanford.edu cmcg at snf.stanford.edu
Wed Jan 9 16:29:17 PST 2008


There were some streaks when running 5 0.7um w/VP 2mm EBR.  Wafer was cleaned prior to running.




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