Shutdown svgcoat SNF 2008-01-23 11:13:08: EBR leak

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Jan 23 11:58:01 PST 2008

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Ran wafers through both tracks. Could not find a leak. Cleaned up residual solvent . Checked and adjusted suckback on 3612 resist pump.  M&G

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