Problem svgcoat SNF 2008-01-23 15:18:33: 1um 3612

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Wed Jan 23 15:18:34 PST 2008


non uniform in the center, needs to adjust the dispense,
after ran 3 dummies and cleaned the nozzel out of 10 wfs only 5 kind of ok. back of almost all wafers has EBR residue.




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