Problem svgcoat SNF 2008-01-23 17:34:57: 7um resist bubble

jparker at jparker at
Wed Jan 23 17:34:58 PST 2008

When coating 7 um resist, for 4 out of 5 wafers a bubble near (.5 cm-2.5 cm) from the center caused a large comet.
A thin line from the dispense nozzle to the center of the wafer happens at the end of the dispense to cause this bubble.

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