Problem svgcoat SNF 2008-01-23 17:34:57: 7um resist bubble

jparker at snf.stanford.edu jparker at snf.stanford.edu
Wed Jan 23 17:34:58 PST 2008


When coating 7 um resist, for 4 out of 5 wafers a bubble near (.5 cm-2.5 cm) from the center caused a large comet.
A thin line from the dispense nozzle to the center of the wafer happens at the end of the dispense to cause this bubble.




More information about the svgcoat-pcs mailing list