Problem svgcoat SNF 2008-01-23 17:34:57: 7um resist bubble
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Fri Jan 25 10:58:00 PST 2008
Cleaned catch cup, adjusted the dispense hose( I noticed that
if the dispense hose is far away from the wafer the uniformity
is a lot better I also recomend to clean the dispense hose from time to time DO NOT USE A Q-TIP WITH A LOT OF
ACETONE , THIS WILL GET A LOT OF ACETONE OVER YOUR WAFER WHILE YOU CLEAN THE DISPENSE HOSE, YOU CAN STILL USE IT BUT JUST AS LITTLE ACETONE AS
POSSIBLE) I Also adjusted the suck back and that also helped to see a better uniformity on your wafer. ,my tests wafers were not PERFECT but lets say they are 98% better than the way
it was before.
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