Problem svgcoat SNF 2008-01-30 10:53:19: Belt before receiver index

jparker at snf.stanford.edu jparker at snf.stanford.edu
Wed Jan 30 10:53:19 PST 2008


Wafers on belt immediately before receiver index sometimes don't make it to the last sensor for the cooldown step. Happened twice during a half cassette of wafers.




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