From gsosa at snf.stanford.edu Tue Jul 1 09:04:30 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 1 Jul 2008 09:04:30 -0700 Subject: Problem svgcoat SNF 2008-06-30 16:27:05: wafer stuck in prime station when running 1um 3612 wo vp Message-ID: Tested system with 1um 3612 program. All tested OK. From gsosa at snf.stanford.edu Tue Jul 1 09:15:16 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 1 Jul 2008 09:15:16 -0700 Subject: Comment svgcoat SNF 2008-06-30 15:49:14: NO EBR Message-ID: Tested track with program 8- 1.6 micron. The EBR looks good and the thickness is OK. From jsuarez at snf.stanford.edu Tue Jul 1 09:55:27 2008 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Tue, 1 Jul 2008 09:55:27 -0700 Subject: Problem svgcoat SNF 2008-07-01 09:55:27: Poor Spin Message-ID: Poor spin - 1 um w/o vp 2mm ebr. streaks towards edge of wf under uv light. also pls adjust ebr, width is over 2mm. thank you From mahnaz at snf.stanford.edu Wed Jul 2 10:42:18 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 2 Jul 2008 10:42:18 -0700 Subject: Comment svgcoat SNF 2008-07-02 10:42:17: cleaned all the dummies. Message-ID: From mahnaz at snf.stanford.edu Wed Jul 2 12:43:28 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 2 Jul 2008 12:43:28 -0700 Subject: Comment svgcoat SNF 2008-07-02 12:43:27: 955-.7 i line Message-ID: readings for .7 um 7113, 7101, 7110,7105,7113 EBR little rough and 4 wfs had very bad ebr splash From gsosa at snf.stanford.edu Thu Jul 10 09:53:19 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 10 Jul 2008 09:53:19 -0700 Subject: Comment svgcoat SNF 2008-07-10 09:53:18: Cup Replaced Message-ID: There was a broken wafer in the process bowl. Replaced the process bowl with clean spare. Tested track operation. All OK From ywidjaja at snf.stanford.edu Fri Jul 11 02:47:29 2008 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Fri, 11 Jul 2008 02:47:29 -0700 Subject: Problem svgcoat SNF 2008-07-11 02:47:27: Streaks observed Message-ID: Streaks observed running 955 i-line resist 1um thickness recipe. From gsosa at snf.stanford.edu Fri Jul 11 14:19:52 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jul 2008 14:19:52 -0700 Subject: Problem svgcoat SNF 2008-07-11 02:47:27: Streaks observed Message-ID: Checked and replaced the 955- .7 resist bottle. Purged dispense line. Cleaned nozzle. Inspected wafers- all looks good. From jparker at snf.stanford.edu Tue Jul 15 09:33:12 2008 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 15 Jul 2008 09:33:12 -0700 Subject: Comment svgcoat SNF 2008-07-15 09:33:11: 1um 3612 good Message-ID: 1um 3612 looks good today (9/10 great, 1/10 had a particle). Nanospec thickness measurements: Top-10493 Ang. Mid-10451Ang. Bot-10468 Ang. Left-10492 Ang. Rght-10477 Ang. From rcordova at snf.stanford.edu Tue Jul 15 17:36:47 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Tue, 15 Jul 2008 17:36:47 -0700 Subject: Comment svgcoat SNF 2008-07-15 17:36:47: Looks like track is ok! Message-ID: Another user pointed out to me that the alarm for resist waste was lit... That is probably why it would not accept wafers! Restarted the track controller and emptied waste. Seems to be workking fine. Haven't tried the vapor prime, From rcordova at snf.stanford.edu Tue Jul 15 17:37:31 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Tue, 15 Jul 2008 17:37:31 -0700 Subject: Comment svgcoat SNF 2008-07-15 17:37:30: Sorry, last comment: Message-ID: last comment was meant for SVG tr#2 NOT 1!!! From mahnaz at snf.stanford.edu Wed Jul 16 16:59:48 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 16 Jul 2008 16:59:48 -0700 Subject: Problem svgcoat SNF 2008-07-16 16:59:48: Dirty belts Message-ID: Belts over the spin cup, need to be cleaned. From gsosa at snf.stanford.edu Thu Jul 17 09:01:33 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 17 Jul 2008 09:01:33 -0700 Subject: Problem svgcoat SNF 2008-07-16 16:59:48: Dirty belts Message-ID: Replaced the coat module belts. Cleaned process area. Tested track function and handling by cycling 25 dummy wafers. All looks good. From vilanova at snf.stanford.edu Thu Jul 17 09:58:19 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 17 Jul 2008 09:58:19 -0700 Subject: Comment svgcoat SNF 2008-07-15 17:36:47: Looks like track is ok! Message-ID: cleared. From vilanova at snf.stanford.edu Thu Jul 17 09:58:31 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 17 Jul 2008 09:58:31 -0700 Subject: Comment svgcoat SNF 2008-07-10 09:53:18: Cup Replaced Message-ID: cleared From vilanova at snf.stanford.edu Thu Jul 17 09:58:50 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 17 Jul 2008 09:58:50 -0700 Subject: Comment svgcoat SNF 2008-06-22 23:16:17: 3612 bottle changed Message-ID: cleared. From vilanova at snf.stanford.edu Thu Jul 17 09:59:06 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 17 Jul 2008 09:59:06 -0700 Subject: Comment svgcoat SNF 2008-07-15 17:37:30: Sorry, last comment: Message-ID: cleared. From vilanova at snf.stanford.edu Thu Jul 17 09:59:45 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 17 Jul 2008 09:59:45 -0700 Subject: Problem svgcoat SNF 2008-07-01 09:55:27: Poor Spin Message-ID: cleared From vilanova at snf.stanford.edu Thu Jul 17 10:00:02 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 17 Jul 2008 10:00:02 -0700 Subject: Comment svgcoat SNF 2008-07-02 10:42:17: cleaned all the dummies. Message-ID: cleared. From vilanova at snf.stanford.edu Thu Jul 17 10:00:17 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 17 Jul 2008 10:00:17 -0700 Subject: Comment svgcoat SNF 2008-07-02 12:43:27: 955-.7 i line Message-ID: cleared From vilanova at snf.stanford.edu Thu Jul 17 10:00:26 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 17 Jul 2008 10:00:26 -0700 Subject: Comment svgcoat SNF 2008-07-15 09:33:11: 1um 3612 good Message-ID: cleared From vilanova at snf.stanford.edu Thu Jul 17 10:01:35 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 17 Jul 2008 10:01:35 -0700 Subject: Comment svgcoat SNF 2008-05-09 15:50:45: 1um and 7um Message-ID: cleared. From vilanova at snf.stanford.edu Thu Jul 17 10:32:17 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 17 Jul 2008 10:32:17 -0700 Subject: Comment svgcoat SNF 2008-07-17 10:32:16: HMDS Vapor prime Update Message-ID: The vapor prime module is still offline. System is usable without vapor prime module. From ccwan at snf.stanford.edu Mon Jul 28 12:59:13 2008 From: ccwan at snf.stanford.edu (ccwan at snf.stanford.edu) Date: Mon, 28 Jul 2008 12:59:13 -0700 Subject: Problem svgcoat SNF 2008-07-28 12:59:13: Wafers do not come out of the sender station Message-ID: From vilanova at snf.stanford.edu Mon Jul 28 14:26:17 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 28 Jul 2008 14:26:17 -0700 Subject: Problem svgcoat SNF 2008-07-28 12:59:13: Wafers do not come out of the sender station Message-ID: found excess of resist on chuck and hotplate, cleaned chuck & hotplate cycled wafers , ready to use. From king at snf.stanford.edu Thu Jul 31 18:43:30 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 31 Jul 2008 18:43:30 -0700 Subject: Problem svgcoat SNF 2008-07-31 18:43:29: Spin chuck won't rise Message-ID: after the wafer has been spun. It alarms and sits there. To continue, clear the alarm, press START on the monitor, and after a few moments it will come back up and proceed normally (until the next wafer is stuck on the chuck).