Problem svgcoat SNF 2008-07-11 02:47:27: Streaks observed

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Jul 11 14:19:52 PDT 2008


Checked and replaced the 955- .7 resist bottle. Purged dispense line. Cleaned nozzle. Inspected wafers- all looks good.




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