Comment svgcoat SNF 2008-07-15 17:36:47: Looks like track is ok!

rcordova at snf.stanford.edu rcordova at snf.stanford.edu
Tue Jul 15 17:36:47 PDT 2008


Another user pointed out to me that the alarm for resist waste was lit...  That is probably why it would not accept wafers!
Restarted the track controller and emptied waste.  Seems to be workking fine.  Haven't tried the vapor prime,  




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