Problem svgcoat SNF 2008-07-28 12:59:13: Wafers do not come out of the sender station

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Jul 28 14:26:17 PDT 2008


found excess of resist on chuck and hotplate, cleaned chuck & hotplate cycled wafers , ready to use. 




More information about the svgcoat-pcs mailing list