Problem svgcoat SNF 2008-07-31 18:43:29: Spin chuck won't rise

king at snf.stanford.edu king at snf.stanford.edu
Thu Jul 31 18:43:30 PDT 2008


after the wafer has been spun.  It alarms and sits there.  To continue,  clear the alarm, press START on the monitor, and after a few moments it will come back up and proceed normally (until the next wafer is stuck on the chuck).  




More information about the svgcoat-pcs mailing list