From vilanova at snf.stanford.edu Mon Jun 9 08:05:14 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 9 Jun 2008 08:05:14 -0700 Subject: Comment svgcoat SNF 2008-06-09 08:05:13: cleaned catch cup and dummy wafers Message-ID: I found a lot of excess resist all over the exhaust system under the catch cup and also on the secondary container maybe someone was manual dispense using too much resist on the track , cleaned catch cup dummy wafers , secondary 'container, replaced dirty alumminun foil that covers the secondary container cleaned the belts. From jsuarez at snf.stanford.edu Mon Jun 9 09:17:17 2008 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Mon, 9 Jun 2008 09:17:17 -0700 Subject: Problem svgcoat SNF 2008-06-09 09:17:16: EBR off-centered Message-ID: 2mm EBR is way off-centered From gsosa at snf.stanford.edu Tue Jun 10 07:26:18 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jun 2008 07:26:18 -0700 Subject: Problem svgcoat SNF 2008-06-09 09:17:16: EBR off-centered Message-ID: Adjusted height of front centering tab. Also adjusted the spindle delay timing from 0 to 3 to allow wafer to firmly bump up against the centering tabs. From mahnaz at snf.stanford.edu Tue Jun 10 11:24:32 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 10 Jun 2008 11:24:32 -0700 Subject: Problem svgcoat SNF 2008-06-10 11:24:31: big resist leak Message-ID: track is running, i do not want to shur it down. From mahnaz at snf.stanford.edu Tue Jun 10 11:26:03 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 10 Jun 2008 11:26:03 -0700 Subject: Shutdown svgcoat SNF 2008-06-10 11:26:03: big leak Message-ID: From gsosa at snf.stanford.edu Tue Jun 10 12:04:18 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jun 2008 12:04:18 -0700 Subject: Problem svgcoat SNF 2008-06-10 11:24:31: big resist leak Message-ID: Could not find leak. Replaced the foil in secondary containment. Tested track operation-All OK. Suspect that pool of resist may have been from 3" wafer processing. Will investigate. Track OK to use. From gsosa at snf.stanford.edu Tue Jun 10 12:04:26 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jun 2008 12:04:26 -0700 Subject: Shutdown svgcoat SNF 2008-06-10 11:26:03: big leak Message-ID: Could not find leak. Replaced the foil in secondary containment. Tested track operation-All OK. Suspect that pool of resist may have been from 3" wafer processing. Will investigate. Track OK to use. From ccwan at snf.stanford.edu Wed Jun 11 10:18:54 2008 From: ccwan at snf.stanford.edu (ccwan at snf.stanford.edu) Date: Wed, 11 Jun 2008 10:18:54 -0700 Subject: Comment svgcoat SNF 2008-06-11 10:18:54: EBR backslash Message-ID: I ran 25 wafers with almost half of them having EBR backslash. From gsosa at snf.stanford.edu Thu Jun 12 09:20:06 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 12 Jun 2008 09:20:06 -0700 Subject: Comment svgcoat SNF 2008-06-11 10:18:54: EBR backslash Message-ID: Checked and adjusted canister pressure. Checked and adjusted nozzle position and angle. Verified 2 and 5 mm widths. Checked for splashback- Looks OK. From mahnaz at snf.stanford.edu Mon Jun 16 10:53:26 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 16 Jun 2008 10:53:26 -0700 Subject: Problem svgcoat SNF 2008-06-16 10:53:25: poor spin Message-ID: user ran 5 dummies. From mahnaz at snf.stanford.edu Mon Jun 16 10:56:53 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 16 Jun 2008 10:56:53 -0700 Subject: Problem svgcoat SNF 2008-06-16 10:56:53: big puddle of resist Message-ID: it happened twice last week as well. From mahnaz at snf.stanford.edu Mon Jun 16 11:51:44 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 16 Jun 2008 11:51:44 -0700 Subject: Problem svgcoat SNF 2008-06-16 11:51:43: poor spin 955 iline Message-ID: This goes back to earlier report of poor spin noticed on 955-.7 cm resist. From quickwin at snf.stanford.edu Mon Jun 16 15:33:42 2008 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Mon, 16 Jun 2008 15:33:42 -0700 Subject: Shutdown svgcoat SNF 2008-06-16 15:33:41: arm stuck Message-ID: From vilanova at snf.stanford.edu Tue Jun 17 11:00:41 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 17 Jun 2008 11:00:41 -0700 Subject: Comment svgcoat SNF 2008-06-17 11:00:40: MOnthly Maintenance ........... Message-ID: Im almost finish with the monthly PM to the tool, I cleaned the catch cup and pretty much the whole system I replaced a broken EBR NOzzle, And Ive tested it, But I still need to run All of the programs to make sure each one of them is ok please the next time you reset the system make sure that the dispense nozzle is not over the chuck , if you do that the chuck will come up and will brake the EBR nozzle i,m still working on it stay tuned............................... From vilanova at snf.stanford.edu Tue Jun 17 14:05:10 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 17 Jun 2008 14:05:10 -0700 Subject: Problem svgcoat SNF 2008-06-16 10:53:25: poor spin Message-ID: completed PM to scg coat tool, I cleaned the , filter for the SC~VG recovery resist pump system ,catch cup and pretty much the whole system I replaced a broken EBR NOzzle, And tested all the programs , please the next time you reset the system make sure that the dispense nozzle is not over the chuck , if you do that the chuck will come up and will brake the EBR nozzle. From vilanova at snf.stanford.edu Tue Jun 17 14:05:40 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 17 Jun 2008 14:05:40 -0700 Subject: Problem svgcoat SNF 2008-06-16 10:56:53: big puddle of resist Message-ID: ompleted PM to svg coat tool, I cleaned the , filter for the SC~VG recovery resist pump system ,catch cup and pretty much the whole system I replaced a broken EBR NOzzle, And tested all the programs , please the next time you reset the system make sure that the dispense nozzle is not over the chuck , if you do that the chuck will come up and will brake the EBR nozzle. From vilanova at snf.stanford.edu Tue Jun 17 14:05:55 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 17 Jun 2008 14:05:55 -0700 Subject: Problem svgcoat SNF 2008-06-16 11:51:43: poor spin 955 iline Message-ID: ompleted PM to svg coat tool, I cleaned the , filter for the SC~VG recovery resist pump system ,catch cup and pretty much the whole system I replaced a broken EBR NOzzle, And tested all the programs , please the next time you reset the system make sure that the dispense nozzle is not over the chuck , if you do that the chuck will come up and will brake the EBR nozzle. From vilanova at snf.stanford.edu Tue Jun 17 14:06:12 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 17 Jun 2008 14:06:12 -0700 Subject: Shutdown svgcoat SNF 2008-06-16 15:33:41: arm stuck Message-ID: ompleted PM to svg coat tool, I cleaned the , filter for the SC~VG recovery resist pump system ,catch cup and pretty much the whole system I replaced a broken EBR NOzzle, And tested all the programs , please the next time you reset the system make sure that the dispense nozzle is not over the chuck , if you do that the chuck will come up and will brake the EBR nozzle. From vilanova at snf.stanford.edu Tue Jun 17 14:06:27 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 17 Jun 2008 14:06:27 -0700 Subject: Comment svgcoat SNF 2008-06-17 11:00:40: MOnthly Maintenance ........... Message-ID: ompleted PM to svg coat tool, I cleaned the , filter for the SC~VG recovery resist pump system ,catch cup and pretty much the whole system I replaced a broken EBR NOzzle, And tested all the programs , please the next time you reset the system make sure that the dispense nozzle is not over the chuck , if you do that the chuck will come up and will brake the EBR nozzle. From vilanova at snf.stanford.edu Tue Jun 17 14:06:44 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 17 Jun 2008 14:06:44 -0700 Subject: Comment svgcoat SNF 2008-05-14 08:24:08: 3612 Resist bottle Message-ID: cleared. From vilanova at snf.stanford.edu Tue Jun 17 14:06:53 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 17 Jun 2008 14:06:53 -0700 Subject: Comment svgcoat SNF 2008-06-09 08:05:13: cleaned catch cup and dummy wafers Message-ID: cleared From mahnaz at snf.stanford.edu Thu Jun 19 10:53:51 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 19 Jun 2008 10:53:51 -0700 Subject: Problem svgcoat SNF 2008-06-19 10:53:51: 955-.7 Message-ID: ran 10 dummies, cleaned the nozzel , I need .7 um to run the qual on asml after software change . first wafer has huge EBR splashes all over the wafer. I think that the track should be shut down. From mahnaz at snf.stanford.edu Thu Jun 19 10:54:26 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 19 Jun 2008 10:54:26 -0700 Subject: Shutdown svgcoat SNF 2008-06-19 10:54:25: EBR splash Message-ID: ran 10 dummies, cleaned the nozzel , I need .7 um to run the qual on asml after software change . first wafer has huge EBR splashes all over the wafer. I think that the track should be shut down. It most likely be the same for all programs. From gsosa at snf.stanford.edu Thu Jun 19 15:45:49 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 19 Jun 2008 15:45:49 -0700 Subject: Shutdown svgcoat SNF 2008-06-19 10:54:25: EBR splash Message-ID: Checked and adjusted nozzle angle( resist and EBR). Checked and adjusted dispense arm position and nozzle center positions. Checked and adjusted EBR position at 5mm, verified 2mm width- both OK. Checked and adjusted canister pressure to 6 PSI. Checked and decreased the EBR flow with the micrometer adjustment. All looks good. From gsosa at snf.stanford.edu Thu Jun 19 15:45:56 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 19 Jun 2008 15:45:56 -0700 Subject: Problem svgcoat SNF 2008-06-19 10:53:51: 955-.7 Message-ID: Checked and adjusted nozzle angle( resist and EBR). Checked and adjusted dispense arm position and nozzle center positions. Checked and adjusted EBR position at 5mm, verified 2mm width- both OK. Checked and adjusted canister pressure to 6 PSI. Checked and decreased the EBR flow with the micrometer adjustment. All looks good. From gsosa at snf.stanford.edu Fri Jun 20 16:15:29 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Jun 2008 16:15:29 -0700 Subject: Shutdown svgcoat SNF 2008-06-20 16:15:29: HPO Lifter problem Message-ID: Wire lifters on hotplate not working smoothly From gsosa at snf.stanford.edu Fri Jun 20 17:54:47 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Jun 2008 17:54:47 -0700 Subject: Shutdown svgcoat SNF 2008-06-20 16:15:29: HPO Lifter problem Message-ID: There is a broken motor mount on the lifter motor causing too moch flex on the lifter leadscrew. The leadscrew binds up and lifters do not raise to the up position. Temporarilly secured the motor mount with tie-wraps. Cycled 25 wafers with no problem. Will order correct parts and make needed repairs. System ready to use. From masaharu at snf.stanford.edu Sun Jun 22 23:16:17 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Sun, 22 Jun 2008 23:16:17 -0700 Subject: Comment svgcoat SNF 2008-06-22 23:16:17: 3612 bottle changed Message-ID: From erichall at snf.stanford.edu Wed Jun 25 11:41:57 2008 From: erichall at snf.stanford.edu (erichall at snf.stanford.edu) Date: Wed, 25 Jun 2008 11:41:57 -0700 Subject: Comment svgcoat SNF 2008-06-25 11:41:54: Wafer in Spincoater Tub Message-ID: On a second use of the track today, I discovered a wafer in the spincoating tub. I think its been there a while, and I didn't notice the first time I used the track this morning. I'm surprised there was no comment about this on Coral! From gsosa at snf.stanford.edu Wed Jun 25 13:48:21 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Jun 2008 13:48:21 -0700 Subject: Comment svgcoat SNF 2008-06-25 11:41:54: Wafer in Spincoater Tub Message-ID: Wafer most have been left there by prevoius user. When I got there , the track was processing wafers. From ykuo at snf.stanford.edu Mon Jun 30 15:49:15 2008 From: ykuo at snf.stanford.edu (ykuo at snf.stanford.edu) Date: Mon, 30 Jun 2008 15:49:15 -0700 Subject: Comment svgcoat SNF 2008-06-30 15:49:14: NO EBR Message-ID: I was using recipe "8 1.6um wo/VP 2mm EBR". It appears to coat much thicker resist and no EBR at all. From lwchang at snf.stanford.edu Mon Jun 30 16:27:05 2008 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Mon, 30 Jun 2008 16:27:05 -0700 Subject: Problem svgcoat SNF 2008-06-30 16:27:05: wafer stuck in prime station when running 1um 3612 wo vp Message-ID: